Iterative Control of Dynamics-Coupling-Caused Errors in Piezoscanners During High-Speed AFM Operation

IEEE Transactions on Control Systems Technology

Volumn 13, Issue 6, 2005, Pages 921-931

  Tien, Szuchi ^a   Devasia, Santosh ^a   Zou, Qingze ^b  

^a University of Washington   (United States)

^b Iowa State University of Science and Technology   (United States)

Author keywords

Atomic force microscope (AFM); inversion; iterative control; nanopositioning; theory

Indexed keywords

ALGORITHMS; ATOMIC FORCE MICROSCOPY; CLOSED LOOP CONTROL SYSTEMS; ITERATIVE METHODS; NANOTECHNOLOGY; PIEZOELECTRIC DEVICES;

DYNAMICS COUPLING EFFECT; INVERSION THEORY; ITERATIVE CONTROL; NANOPOSITIONING; PIEZOSCANNERS;

CONTROL THEORY;

EID: 27844526214     PISSN: 10636536     EISSN: 15580865     Source Type: Journal    
DOI: 10.1109/TCST.2005.854334     Document Type: Article

References (28)

1. J. Ghosh and B. Paden, “Pseudo-inverse based iterative learning control for plants with unmodeled dynamics,” in Proc. Amer. Control Conf., 2000, pp. 472–476.
2. J. Ghosh and B. Paden, “Iterative learning control for nonlinear nonminimum phase plants,” ASME J. Dyn. Syst. Meas. Control, vol. 123, pp. 21–30, Mar. 2001.
3. X. Wang and D. Chen, “Robust inversion-based learning control for non-minimum phase system,” in Proc. IEEE Int. Conf. System, Man, and Cybernetics, vol. 3, Oct. 2002, pp. 489–494.
4. E. Dubois and J. L. Bubendorff, “Kinetics of scanned probe oxidation: space-charge limited growth,” J. Appl. Phys., vol. 87, no. 11, pp. 8148–8154, 2000.
5. R. Garcia, M. Calleja, and H. Rohrer, “Patterning of silicon surfaces with noncontact atomic force microscopy: field-induced formation of nanometer-size water bridges,” J. Appl. Phys., vol. 86, no. 4, pp. 1898–1903, 1999.
6. C. Rotsch, F. Braet, E. Wisse, and M. Radmacher, “AFM imaging and elasticity measurements on living rat liver macrophages,” Cell Biol. Int., vol. 21, no. 11, pp. 685–696, 1997.
7. J. Domke and M. Radmacher, “Measuring the elastic properties of thin polymer film with the atomic force microscope,” Langmuir, vol. 14, no. 12, pp. 3320–3325, 1998.
8. C. L. Grimellec, E. Lesniewska, M. C. Giocondi, E. Finot, V. Vie, and J. P. Goudonnet, “Imaging of the surface of living cells by low-force contact-mode atomic force microscopy,” Biophys. J., vol. 75, pp. 695–703, Aug. 1998.
9. M. B. Viani, T. E. Schaffer, A. Chand, M. Rief, H. E. Gaub, and P. K. Hansma, “Small cantilever for force spectroscopy of single molecules,” J. Appl. Phys., vol. 86, no. 4, pp. 2258–2262, 1999.
10. F. El Feninat, T. H. Ellis, E. Sacher, and I. Stangel, “A tapping mode AFM study of collapse and denaturation in dentinal collagen,” Dental Mater., vol. 17, pp. 284–288, 2001.
11. G. W. Marshall, I. C. Wu-Magidi, L. G. Watanabe, N. Inai, M. Balooch, J. H. Kinney, and S. J. Marshall, “Effect of citric acid concentration on dentin demineralization, dehydration, and rehydration: atomic force microscopy study,” J. Biomed. Mater. Res., vol. 42, pp. 500–507, 1998.
12. O. M. El Rifai and K. Youcef-Toumi, “Coupling in piezoelectric tube scanners used in scanning probe microscopes,” in Proc. Amer. Control Conf, 2001, pp. 3251–3255.
13. G. Schitter, P. Menold, H. F. Knapp, F. Allgower, and A. Stemmer, “High performance feedback for fast scanning atomic force microscopes,” Rev. Sci. Instrum., vol. 72, no. 8, pp. 3320–3327, 2001.
14. S. Salapaka, A. Sebastian, J. P. Cleveland, and M. V. Salapaka, “High bandwidth nano-positioner: a robust control approach,” Rev. Sci. Instrum., vol. 73, no. 9, pp. 3232–3241, Sep. 2002.
15. M. S. Tsai and J. S. Chen, “Robust tracking control of a piezoactuator using a new approximate hysteresis model,” ASME J. Dyn. Syst. Meas. Control, vol. 125, pp. 96–102, Mar. 2003.
16. R. C. Barrett and C. F. Quate, “Optical scan-correction system applied to Atomic force microscopy,” Rev. Sci. Instrum., vol. 62, pp. 1393–1399, 1991.
17. J. A. Main and E. Garcia, “Piezoelectric stack actuators and control system design: strategies and pitfalls,” J. Guid. Control Dyn., vol. 20, no. 3, pp. 479–485, May-Jun. 1997.
18. Q. Zou, K. K. Leang, E. Sadoun, M. J. Reed, and S. Devasia, “Control issues in high-speed AFM for biological applications: collagen imaging example,” Asian J. Control, vol. 6, no. 2, pp. 164–178, Jun. 2004.
19. D. Croft, G. Shedd, and S. Devasia, “Creep, hysteresis, and vibration compensation for piezoactuators: atomic force microscopy application,” ASME J. Dyn. Syst. Meas. Control, vol. 123, no. 35, pp. 35–43, Mar. 2001.
20. D. Croft and S. Devasia, “Vibration compensation for high speed scanning tunneling microscopy,” Rev. Sci. Instrum., vol. 70, no. 12, pp. 4600–4605, Dec. 1999.
21. H. Perez, Q. Zou, and S. Devasia, “Design and control of optimal scan-trajectories: scanning tunneling microscope example,” J. Dyn. Syst. Meas. Control, vol. 126, no. 1, pp. 187–197, 2004.
22. Q. Zou and S. Devasia, “Preview-based optimal inversion for output tracking: application to scanning tunneling microscopy,” IEEE Trans. Contr. Syst. Technol., vol. 12, no. 3, pp. 375–386, May 2004.
23. S. Devasia, “Should model-based inverse input be used as feedforward under plant uncertainty?,” IEEE Trans. Autom. Control, vol. 47, no. 11, pp. 1865–1871, Nov. 2002.
24. E. Bayo, “A finite-element approach to control the end-point motion of a single-link flexible robot,” J. Robot. Syst., vol. 4, no. 1, pp. 63–75, 1987.
25. H. G. Hansma, “Surface biology of DNA by atomic force microscopy,” Annu. Rev. Phys. Chem., vol. 52, pp. 71–92, 2001.
26. G. Schitter, F. Allgower, and A. Stemmer, “A new control strategy for high-speed atomic force microscopy,” Nanotechnol., vol. 15, pp. 108–114, 2004.
27. G. Schitter and A. Stemmer, “Model-based signal conditioning for high-speed atomic force and friction force microscopy,” Microelect. Eng., pp. 938–944, 2003.
28. D. Williamson, Discrete-Time Signal Processing. New York: Springer-Verlag, 1999, p. 267.