Robust 2DOF-control of a piezoelectric tube scanner for high speed atomic force microscopy

Proceedings of the American Control Conference

Volumn 5, Issue , 2003, Pages 3720-3725

  Schitter, G ^a   Stemmer, A ^a   Allgower F ^b  

^a ETH ZURICH   (Switzerland)

^b UNIVERSITY OF STUTTGART   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC FORCE MICROSCOPY; CLOSED LOOP CONTROL SYSTEMS; DEGREES OF FREEDOM (MECHANICS); ERROR ANALYSIS; ROBUSTNESS (CONTROL SYSTEMS); TUBES (COMPONENTS);

PIEZOELECTRIC TUBE SCANNERS;

PIEZOELECTRIC DEVICES;

EID: 0142169340     PISSN: 07431619     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (14)

1. G. Binnig, C.F. Quate, and C. Gerber, Atomic force microscope. Physical Review Letters, 56(9): p. 930-933, 1986.
2. G. Binnig and D.P.E. Smith, Single-tube three-dimensional scanner for scanning tunneling microscopy. Review of Scientific Instruments, 57(8, pt.1): p. 1688-1689, 1986.
3. D. Sarid, Scanning Force Microscopy. Oxford series in optical and imaging sciences. New York: Oxford University Press, 1994.
4. A. Daniele, T. Nakata, L. Giarre, M.V. Salapaka, and M. Dahleh. Robust identification and control of scanning probe microscope scanner. in Robust Control Design. (ROCOND'97). Proceedings Volume from the IFAC Symposium. 25-27 June 1997; Budapest, Hungary, 1997.
5. R.V. Lapshin and O.V. Obyedkov, Fast-acting piezoactuator and digital feedback loop for scanning tunneling microscopes. Review of Scientific Instruments, 64(10): p. 2883-2887, 1993.
6. G. Schitter, P. Menold, H.F. Knapp, F. Allgöwer, and A. Stemmer, High performance feedback for fast scanning atomic force microscopes. Review of Scientific Instruments, 72(8): p. 3320-3327, 2001.
7. P. Van Overschee and B. De Moor, N4SID: subspace algorithms for the identification of combined deterministic-stochastic systems. Automatica, 30(1): p. 75-93, 1994.
8. M. Viberg, Subspace-based methods for the identification of linear time-invariant systems. Automatica, 31(12): p. 1835-1851, 1995.
9. L. Ljung, System Identification, Theory for the User, 2nd Ed. PTR Prentice Hall Information and System Sciences Series, ed. T. Kailath. Upper Saddle River, NJ: Prentice Hall, 1999.
10. DSP-System: processor board DS1005, 16-bit A/D-board DS2001, 16-bit D/A-board DS2102, dSpace: Germany.
11. G.F. Franklin, J.D. Powell, and M.L. Workman, Digital Control of Dynamic Systems. 3rd ed. Addison-Wesley Longman Control Engineering. Menlo Park, CA, USA: Addison-Wesley, 1998.
12. K.J. Aström and T. Hägglund, PID Controllers: Theory, Design, and Tuning, 2nd Ed. Research Triangle Park, NC: Instrument Society of America, 1995.
13. S. Skogestad and I. Postlethwaite, Multivariable Feedback Control. Chichester: John Wiley & Sons, 1996.
14. G. Schitter and A. Stemmer, Model-based signal conditioning for high-speed atomic force and friction force microscopy. Microelectronic Engineering, in press, 2003.