Feedforward control of a piezoelectric flexure stage for AFM

Proceedings of the American Control Conference

Volumn , Issue , 2008, Pages 2703-2709

  Li, Yang ^a   Bechhoefer, John ^a  

^a SIMON FRASER UNIVERSITY   (Canada)

Author keywords

[No Author keywords available]

Indexed keywords

INDUSTRIAL MANAGEMENT; ITERATIVE METHODS; STAGES; STANDARDS;

CONTROL SIGNALLING; CONTROL TECHNIQUES; EFFECTIVE BANDWIDTH; FEED FORWARD; FEEDFORWARD FILTER; FEEDFORWARD TECHNIQUE; ITERATIVE CONTROL; MODEL-BASED; MODEL-FREE; PHASE LAGS; POSITIONING STAGE; SCANNING PROBE MICROSCOPES; SYSTEM TRANSFER FUNCTION;

TRANSFER FUNCTIONS;

EID: 52649092491     PISSN: 07431619     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ACC.2008.4586901     Document Type: Conference Paper

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