Feature-oriented scanning methodology for probe microscopy and nanotechnology

Nanotechnology

Volumn 15, Issue 9, 2004, Pages 1135-1151

  Lapshin, Rostislav V ^a  

^a KAPITZA INSTITUTE FOR PHYSICAL PROBLEMS   (Russian Federation)

Author keywords

[No Author keywords available]

Indexed keywords

DIFFRACTION GRATINGS; FEATURE EXTRACTION; INTEGRATED CIRCUITS; NANOTECHNOLOGY; PROBES; SEMICONDUCTOR QUANTUM DOTS; SURFACE PROPERTIES; SURFACE TOPOGRAPHY;

FEATURE POSITIONING; FEATURE-ORIENTED SCANNING (FOS); SCANNING ALGORITHMS; SCANNING PROBE MICROSCOPES (SPM);

SCANNING;

EID: 4644241550     PISSN: 09574484     EISSN: None     Source Type: Journal    
DOI: 10.1088/0957-4484/15/9/006     Document Type: Article

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