Design and input-shaping control of a novel scanner for high-speed atomic force microscopy

Mechatronics

Volumn 18, Issue 5-6, 2008, Pages 282-288

  Schitter, Georg ^a,b   Thurner, Philipp J ^b   Hansma, Paul K ^b  

^a DELFT UNIVERSITY OF TECHNOLOGY   (Netherlands)

^b UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

AFM; Fast scanning; Mechanical design; Nano positioning; Nanotechnology; Real time imaging; Scanning probe

Indexed keywords

COMPUTATIONAL GEOMETRY; NANOTECHNOLOGY; NATURAL FREQUENCIES; OPTIMIZATION; REAL TIME SYSTEMS;

FAST SCANNING; MECHANICAL DESIGN; NANOPOSITIONING; REAL-TIME IMAGING; SCANNING PROBES;

ATOMIC FORCE MICROSCOPY;

EID: 43649098093     PISSN: 09574158     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mechatronics.2008.02.007     Document Type: Article

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