Model-less inversion-based iterative control for output tracking: Piezo actuator example

Proceedings of the American Control Conference

Volumn , Issue , 2008, Pages 2710-2715

  Kim, Kyong Soo ^a   Zou, Qingze ^a  

^a Iowa State University of Science and Technology   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC PHYSICS; ATOMS; CONVERGENCE OF NUMERICAL METHODS; EXTREME ULTRAVIOLET LITHOGRAPHY; SCANNING;

ATOMIC FORCE MICROSCOPE; CONVERGENCE ANALYSIS; HIGH SPEEDS; INPUT ERROR; ITERATION STEP; ITERATIVE CONTROL; LATERAL SCANNING; MEASUREMENT NOISES; MODELING PROCESSES; OUTPUT TRACKING; PIEZO ACTUATOR; SIGNAL RATIOS;

ITERATIVE METHODS;

EID: 52449100992     PISSN: 07431619     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ACC.2008.4586902     Document Type: Conference Paper

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