Preview-based optimal inversion for output tracking: Application to scanning tunneling microscopy

IEEE Transactions on Control Systems Technology

Volumn 12, Issue 3, 2004, Pages 375-386

  Zou, Qingze ^a   Devasia, Santosh ^a  

^a UNIVERSITY OF WASHINGTON   (United States)

Author keywords

Nanotechnology; Output tracking; Scanning; Scanning tunneling microscope (STM); System inversion

Indexed keywords

ELECTRON BEAM LITHOGRAPHY; NANOTECHNOLOGY; SCANNING TUNNELING MICROSCOPY; TIME DOMAIN ANALYSIS; TRACKING (POSITION); X RAY LITHOGRAPHY;

OPTIMAL INVERSION; OUTPUT TRACKING; SYSTEM INVERSION;

CONTROL SYSTEM SYNTHESIS;

EID: 2442505767     PISSN: 10636536     EISSN: None     Source Type: Journal    
DOI: 10.1109/TCST.2004.824797     Document Type: Article

References (30)

1. L. Silverman, "Inversion of multivariable linear systems," IEEE Trans. Automat. Contr., vol. AC-14, pp. 270-276, Mar. 1969.
2. E. Bayo, "A finite-element approach to control the end-point motion of a single-link flexible robot," J. Robot Syst., vol. 4, no. 1, pp. 63-75, 1987.
3. S. Devasia, D. Chen, and B. Paden, "Nonlinear inversion-based output tracking," IEEE Trans. Automat. Contr., vol. 41, pp. 939-942, July 1996.
4. D. Kwon and W. J. Book, "A time-domain inverse dynamic tracking control of a single-link flexible manipulator," J. Dynamic Syst. Measurement Control, vol. 116, no. 2, pp. 193-200, 1994.
5. B. Paden, D. Chen, R. Ledesma, and E. Bayo, "Exponentially stable tracking control for multi-joint flexible manipulators," ASME J. Dynamic Syst. Measurement Control, vol. 115, no. 1, pp. 53-59, 1993.
6. C. Tomlin, J. Lygeros, and S. Sastry, "Output tracking for a nonminimum phase dynamic CTOL aircraft model," in Proc. IEEE Conf. Decision and Control, New Orleans, LA, 1995, pp. 1867-1872.
7. D. Croft, G. Shedd, and S. Devasia, "Creep, hysteresis, and vibration compensation for piezoactuators: atomic force microscopy application," ASME J. Dynamic Syst. Measurement Control, vol. 123, no. 35, pp. 35-43, Mar. 2001.
8. J. S. Dewey, K. Leang, and S. Devasia, "Experimental and theoretical results in output-trajectory redesign for flexible structures," ASME J. Dynamics Syst. Measurement Control, vol. 120, pp. 456-461, Dec. 1998.
9. S. Devasia, "Should model-based inverse input be used as feedforward under plant uncertainty?," IEEE Trans. Automat. Contr., vol. 47, no. 11, pp. 1865-1871, Nov. 2002.
10. Q. Zou and S. Devasia, "Preview-based stable-inversion for output tracking of linear systems," ASME J. Dynamic Syst. Measurement Control, vol. 121, no. 1, pp. 625-630, Dec. 1999.
11. G. M. Whitesides and H. C. Love, "The art of building small," Sci. Amer., vol. 285, no. 3, pp. 39-47, Sept. 2001.
12. A. Daniele, S. Salapaka, M. V. Salapaka, and M. Dahleh, "Piezoelectric scanners for atomic force microscopes: design of lateral sensors, identification and control," in Proc. American Control Conf., San Diego, CA, June 1999, pp. 253-257.
13. J. A. Main and E. Garcia, "Piezoelectric stack actuators and control system design: strategies and pitfalls," J. Guid. Control Dyn., vol. 20, no. 3, pp. 479-485, May-June 1997.
14. 2 control for vibration suppression of a piezo-electric laminate beam," in Proc. IEEE Conf. Decision and Control, Orlando, FL, Dec. 2001, pp. 3860-3865.
15. N. Hidehiko and M. Tomizuka, "Setting control and performance of dual-actuator systems for hard disk drives," in Proc. American Control Conf., Arlington, VA, June 2001, pp. 2779-2785.
16. V. Gosavi, V. Shekhar, and A. G. Kelkar, "Passivity-based robust control of piezo-actuated flexible beam," in Proc. American Control Conf., Arlington, VA, June 2001, pp. 2492-2497.
17. P. Ge and M. Jouaneh, "Tracking control of a piezoceramic actuator," IEEE Trans. Contr. Syst. Technol., vol. 4, pp. 209-216, May 1996.
18. J. M. Cruz-Hernandez and V. Hayward, "Phase control approach to hysteresis reduction," IEEE Trans. Contr. Syst. Technol., vol. 9, no. 1, pp. 17-26, Jan. 2001.
19. R. C. Barrett and C. F. Quate, "Optical scan-correction system applied to automatic force microscopy," Rev. Sci. Instrum., vol. 62, pp. 1393-1399, 1991.
20. D. Croft and S. Devasia, "Vibration compensation for high speed scanning tunneling microscopy," Rev. Sci. Instrum., vol. 70, no. 12, pp. 4600-4605, Dec. 1999.
21. N. K. Gupta, "Frequency shaped cost functionals: extension of linear-quadratic-gaussian design methods," J. Guid. Control, vol. 3, no. 6, pp. 529-535, Nov. 1980.
22. R. Brinkerhoff and S. Devasia, "Output tracking for actuator deficient/redundant systems: multiple piezoactuator example," J. Guid. Control Dyn., vol. 23, no. 2, pp. 370-373, 2000.
23. T. Kailath, Linear Systems. Englewood Cliffs, NJ: Prentice-Hall, 1980.
24. H. Kwakernaak and R. Sivan, "The maximally achievable accuracy of linear optimal regulators and linear optimal filters," IEEE Trans. Automat. Contr., vol. AC-17, pp. 79-85, Feb. 1972.
25. L. Qiu and E. J. Davison, "Performance limitations of nonminimum phase systems in the servomechanism problem," Automatica, vol. 29, pp. 337-349, Mar. 1993.
26. C. Z. Cai, X. Y. Chen, Q. Q. Shu, and X. L. Zheng, "Computer correction for distorted STM images," Rev. Sci. Instrum., vol. 63, no. 12, pp. 5649-5652, Dec. 1993.
27. K. G. Vandervoort, R. K. Zasadzinski, G. G. Galicia, and G. W. Crabtree, "Full temperature calibration from 4 to 300 k of the voltage response of piezoelectric tube scanner pzt-5a for use in scanning tunneling microscopes," Rev. Sci. Instrum., vol. 64, no. 4, pp. 896-899, Apr. 1993.
28. H. J. Guntherodt and R. Wiesendanger, Eds., Scanning Tunneling Microscopy I, 2nd ed. Heidelberg, Germany: Springer-Verlag 1994, Surface Sci.
29. I. Pitas, Digital Image Processing Algorithms Applications. New York: Wiley, 2000.
30. W. Rudin, Real and Complex Analysis, 3rd ed. New York: McGraw-Hill, 1966.