A new approach to scan-trajectory design and track: AFM force measurement example

Journal of Dynamic Systems, Measurement and Control, Transactions of the ASME

Volumn 130, Issue 5, 2008, Pages 0510051-05100510

  Kim, Kyong Soo ^a   Zou, Qingze ^a   Su, Chanmin ^b  

^a Iowa State University of Science and Technology   (United States)

^b VEECO INSTRUMENTS INC   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

APPLICATIONS.; ATOMIC FORCE MICROSCOPE; FREQUENCY RANGING; HIGH SPEEDS; ITERATIVE CONTROL; LIGHTLY DAMPED SYSTEMS; MODELING ERRORS; NEW APPROACHES; PRACTICAL ISSUES; PRE FILTERING; TRACKING ERRORS; TRAJECTORY DESIGNS; TRAJECTORY TRACKING;

ERRORS; EXTREME ULTRAVIOLET LITHOGRAPHY; FLEXIBLE STRUCTURES; FORCE MEASUREMENT; MOTION ESTIMATION; PIEZOELECTRIC ACTUATORS; SCANNING; TRAJECTORIES;

ITERATIVE METHODS;

EID: 52649144332     PISSN: 00220434     EISSN: None     Source Type: Journal    
DOI: 10.1115/1.2936841     Document Type: Article

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