Coupling in piezoelectric tube scanners used in scanning probe microscopes

Proceedings of the American Control Conference

Volumn 4, Issue , 2001, Pages 3251-3255

  El Rifai, O M ^a   Youcef Toumi, K ^a  

^a MASSACHUSETTS INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

DYNAMICS; MATHEMATICAL MODELS; MICROSCOPES; PIEZOELECTRIC MATERIALS; SCANNING; SENSORS;

ATOMIC FORCE MICROSCOPE; PIEZOELECTRIC TUBE SCANNERS; SCANNING PROBE MICROSCOPE;

FEEDBACK CONTROL;

EID: 0034857597     PISSN: 07431619     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/acc.2001.946423     Document Type: Conference Paper

References (5)

1. Dynamics of contact-mode atomic force microscopes
2. On factors affecting the performance of atomic force microscopes in contact-mode
3. Dynamics and control of piezotube actuators for subnanometer precision applications
4. Dynamics of piezoelectric tube scanners for scanning probe microscopy