SCOPUS 정보 검색 플랫폼

Volumn 70, Issue 6, 1999, Pages 2822-2827

Nanometer-scale patterning and individual current-controlled lithography using multiple scanning probes

Author keywords

[No Author keywords available]

Indexed keywords

CAPACITANCE; ELECTRIC CURRENT CONTROL; ELECTRON EMISSION; SCANNING;

NANOMETER-SCALE PATTERNING; SCANNING PROBE LITHOGRAPHY (SPL);

PHOTORESISTS;

EID: 0032615554 PISSN: 00346748 EISSN: None Source Type: Journal
DOI: 10.1063/1.1149802 Document Type: Article

Times cited : (51)

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