Design of hysteresis-compensating iterative learning control for piezo-positioners: Application to atomic force microscopes

Mechatronics

Volumn 16, Issue 3-4, 2006, Pages 141-158

  Leang, Kam K ^a   Devasia, Santosh ^b  

^a Virginia Commonwealth University   (United States)

^b University of Washington   (United States)

Author keywords

Atomic force microscope; High precision positioning; Hysteresis; Iterative learning control; Piezo positioner; Preisach model

Indexed keywords

ALGORITHMS; ATOMIC FORCE MICROSCOPY; HYSTERESIS; ITERATIVE METHODS; SENSORS;

ITERATIVE LEARNING CONTROL; LEARNING CONTROL ALGORITHMS; PREISACH HYSTERESIS;

PIEZOELECTRIC DEVICES;

EID: 32044461813     PISSN: 09574158     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mechatronics.2005.11.006     Document Type: Article

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