Iterative control approach to high-speed force-distance curve measurement using AFM: Time-dependent response of PDMS example

Ultramicroscopy

Volumn 108, Issue 9, 2008, Pages 911-920

  Kim, Kyong Soo ^a   Lin, Zhiqun ^a   Shrotriya, Pranav ^a   Sundararajan, Sriram ^a   Zou, Qingze ^a  

^a Iowa State University of Science and Technology   (United States)

Author keywords

High speed force distance curve; Iterative learning control; PDMS; Scanning probe microscopy; Time dependent material properties

Indexed keywords

ATOMIC FORCE MICROSCOPY; DYNAMIC ANALYSIS; DYNAMIC MECHANICAL ANALYSIS; DYNAMIC RESPONSE; ELASTIC MODULI; EXTREME ULTRAVIOLET LITHOGRAPHY; MEASUREMENTS; MICROCHANNELS; SPEED; STANDARDS;

(P ,P ,T) MEASUREMENTS; ATOMIC FORCE MICROSCOPE (AFM); BROAD SPECTRUM; CONTROL TECHNIQUES; DEFORMATION RATES; DYNAMIC MECHANICAL ANALYSIS (DMTA); ELSEVIER (CO); EXPERIMENTAL RESULTS; FORCE CURVE MEASUREMENTS; FORCE DISTANCE (F D) CURVES; HIGH SPEEDS; ITERATIVE CONTROL; LOW SPEED; POLY(DI-METHYLSILOXANE) (PDMS); RATE INCREASES; SPATIAL RESOLUTION (SR); TIME-DEPENDENT; TIME-DEPENDENT RESPONSE; VISCOELASTIC RESPONSE;

CURVES (ROAD);

DIMETICONE;

ARTICLE; MATHEMATICAL COMPUTING; MEASUREMENT; QUANTITATIVE ANALYSIS; SCANNING PROBE MICROSCOPY; YOUNG MODULUS;

EID: 48149087953     PISSN: 03043991     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.ultramic.2008.03.001     Document Type: Article

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