Creep, hysteresis, and vibration compensation for piezoactuators: Atomic force microscopy application

Journal of Dynamic Systems, Measurement and Control, Transactions of the ASME

Volumn 123, Issue 1, 2001, Pages 35-43

  Croft, D ^a   Shed, G ^b   Devasia, S ^c  

^a University of Utah   (United States)

^b EXFO   (Canada)

^c University of Washington   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0002199949     PISSN: 00220434     EISSN: 15289028     Source Type: Journal    
DOI: 10.1115/1.1341197     Document Type: Article

References (27)

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