Feedback-linearized inverse feedforward for creep, hysteresis, and vibration compensation in AFM piezoactuators

IEEE Transactions on Control Systems Technology

Volumn 15, Issue 5 SPEC. ISS., 2007, Pages 927-935

  Leang, Kam K ^a   Devasia, Santosh ^b  

^a Virginia Commonwealth University   (United States)

^b UNIVERSITY OF WASHINGTON   (United States)

Author keywords

Creep; Feedback control; High precision positioning; Hysteresis; Inversion based feedforward control; Piezo actuator; Vibration

Indexed keywords

AFM; ATOMIC FORCE MICROSCOPES; CREEP EFFECTS; FEED-FORWARD CONTROLLERS; FEEDBACK CONTROLLED SYSTEMS; FEEDFORWARD; FEEDFORWARD INPUTS; HIGH-GAIN FEEDBACKS; HIGH-PRECISION POSITIONING; HIGH-SPEED POSITIONING; INVERSION-BASED FEEDFORWARD CONTROL; LINEARIZED SYSTEMS; MAXIMUM ERRORS; NON-LINEAR DYNAMICS; PIEZO ACTUATOR; ROOT MEAN SQUARES; SCAN RATES; TRACKING ERRORS; VIBRATION; VIBRATION COMPENSATIONS; VIBRATION EFFECTS; VIBRATIONAL DYNAMICS;

ACTUATORS; CREEP; DYNAMICS; FEEDBACK CONTROL; FEEDFORWARD CONTROL; HYSTERESIS; LINEARIZATION;

FEEDBACK;

EID: 44349155284     PISSN: 10636536     EISSN: None     Source Type: Journal    
DOI: 10.1109/TCST.2007.902956     Document Type: Article

References (28)

1. C. Taylor, E. Stach, A. Malshe, and G. Salamo, "Nanoscale dislocation patterning by ultralow load indentation," Appl. Phys. Lett., vol. 87, p. 073108, 2005.
2. M. Bayer, G. Ortner, A. Forchel, Y. B. Lyanda-Geller, T. L. Geinecke, P. Hawrylak, S. Fafard, and Z. R. Wasilewski, "Fine structure of excitions in InAs/GaAs coupled quantum dots: A sensitive test of electronic coupling," Phys. Rev. Lett., vol. 80, p. 086404, 2003.
3. C. S. Lent, P. D. Tougaw, W. Porod, and G. H. Bernstein, "Quantum cellular automata," Nanotechnol., vol. 4, pp. 49-57, 1993.
4. D. Croft, G. Shed, and S. Devasia, "Creep, hysteresis, and vibration compensation for piezoactuators: Atomic force microscopy application," ASME J. Dyn. Syst., Meas., Control, vol. 123, pp. 35-43, 2001.
5. H. Jung and D.-G. Gweon, "Creep characteristics of piezoelectric actuators," Rev. Sci. Instrum., vol. 71, no. 4, pp. 1896-1900, 2000.
6. D. C. Jiles and D. L. Atherton, "Theory of ferromagnetic hysteresis," J. Magn. Magn. Mater., vol. 61, pp. 48-60, 1986.
7. R. C. Barrett and C. F. Quate, "Optical scan-correction system applied to atomic force microscopy," Rev. Sci. Instrum., vol. 62, no. 6, pp. 1393-1399, 1991.
8. A. E. Holman, P. M. L. O. Scholte, W. C. Heerens, and F. Tuinstra, "Analysis of piezo actuators in translation construction," Rev. Sci. Instrum., vol. 66, no. 5, pp. 3208-3215, 1995.
9. Y. Okazaki, "A micro-positioning tool post using a piezoelectric actuator for diamond turning machines," Precision Eng., vol. 12, no. 3, pp. 151-156, 1990.
10. S. Salapaka, A. Sebastin, J. P. Cleveland, and M. V. Salapaka, "High bandwidth nano-positioner: A robust control approach," Rev. Sci. Instrum., vol. 73, no. 9, pp. 3232-3241, 2002.
11. M.-S. Tsai and J.-S. Chen, "Robust tracking control of a piezoactuator using a new approximate hysteresis model," ASME J. Dyn. Syst., Meas., Control, vol. 125, pp. 96-102, 2003.
12. H.-J. Lee and D. A. Saravanos, "The effect of temperature dependent material properties on the response of piezoelectric composite materials," J. Intell. Mater. Syst. Struct., vol. 9, pp. 503-508, 1998.
13. P. Ge and M. Jouaneh, "Tracking control of a piezoceramic actuator," IEEE Trans. Control Syst. Technol., vol. 4, no. 3, pp. 209-216, May 1996.
14. H. Janocha and K. Kuhnen, "Real-time compensation of hysteresis and creep in piezoelectric actuators," Sens. Actuators A, vol. 79, pp. 83-89, 2000.
15. S. Majima, K. Kodama, and T. Hasegawa, "Modeling of shape memory alloy actuator and tracking control system with the model," IEEE Trans. Control Syst. Technol., vol. 9, no. 1, pp. 54-59, Jan. 2001.
16. W. S. Oates and C. S. Lynch, "Piezoelectric hydraulic pump system dynamic model," J. Intell. Meter. Syst. Struct., vol. 12, no. 11, pp. 737-744, 2001.
17. S. Devasia, "Should model-based inverse inputs be used as feedforward under plant uncertainty?," IEEE Trans. Autom. Control, vol. 47, no. 11, pp. 1865-1871, Nov. 2002.
18. C. J. Chen, "In situ testing and calibration of tube piezoelectric scanners," Ultramicroscopy, vol. 42-44, pp. 1653-1658, 1992.
19. H. Y. F. Lam, Analog and Digital Filters: Design and Realization. Englewood Cliffs, NJ: Prentice-Hall, 1979.
20. R.C. Dorf and R. H. Bishop, Modern Control Systems. Upper Saddle River, NJ: Prentice-Hall, 2001.
21. K. R. Koops, P. M. L. O. Scholte, and W. L. de Koning, "Observation of zero creep in piezoelectric actuators," Appl. Phys. A, vol. 68, pp. 691-697, 1999.
22. G. Binnig, "Force microscopy," Ultramicroscopy, vol. 42-44, pp. 7-15, 1992.
23. G. Schitter and A. Stemmer, "Identification and open-loop tracking control of a piezoelectric tube scanner for high-speed scanning-probe microscopy," IEEE Control Syst. Technol., vol. 12, no. 3, pp. 449-454, May 2004.
24. Q. Zou and S. Devasia, "Preview-based stable-inversion for output tracking," ASME J. Dyn. Syst. Meas. Control, vol. 121, no. 4, pp. 625-630, 1999.
25. J. S. Dewey, K. K. Leang, and S. Devasia, "Experimental and theoretical results in output-trajectory redesign for flexible structures," ASME J. Dyn. Syst., Meas., Control, vol. 120, pp. 456-461, 1998.
26. K.K. Leang and S. Devasia, "Design of hysteresis-compensating iterative learning control for piezo positioners: Application to atomic force microscopes," Mechatron., vol. 6, no. 3-4, pp. 141-158, 2006.
27. G. Tchoupo and K. K. Leang, "Hysteresis compensation for high-precision positioning of a shape memory alloy actuator using integrated iterative-feedforward and feedback inputs," in Proc. Amer. Control Conf., 2007, pp. 4246-4253.
28. S. Tien, Q. Zou, and S. Devasia, "Iterative control of dynamics-coupling-caused errors in piezoscanners during high-speed AFM operation," IEEE Trans. Control Syst. Technol., vol. 13, no. 6, pp. 921-931, Nov. 2005.