Hysteresis inverse iterative learning control of piezoactuators in AFM

IFAC Proceedings Volumes (IFAC-PapersOnline)

Volumn 17, Issue 1 PART 1, 2008, Pages

  Leang, Kam K ^a   Ashley, Seth ^a   Aridogan, Mustafa U ^a  

^a NONE

Author keywords

Intelligent controllers; Mechatronic systems; Microsystems; Nano and micro technologies

Indexed keywords

AFM; CONTROL INPUTS; HYSTERESIS BEHAVIOR; HYSTERESIS INVERSE; INTELLIGENT CONTROLLERS; INVERSE MODELS; ITERATIVE LEARNING CONTROL; LEARNING GAIN; MECHATRONIC SYSTEMS; NANO- AND MICRO-TECHNOLOGIES; OUTPUT-TRACKING; PIEZO-ACTUATORS; TRACKING ERRORS;

CONTROLLERS; HYSTERESIS; INTELLIGENT CONTROL; LEARNING SYSTEMS; MECHATRONICS; MICROSYSTEMS; TWO TERM CONTROL SYSTEMS;

LEARNING ALGORITHMS;

EID: 79961018173     PISSN: 14746670     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.3182/20080706-5-KR-1001.3398     Document Type: Conference Paper

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