Piezoelectric scanners for atomic force microscopes: Design of lateral sensors, identification and control

Proceedings of the American Control Conference

Volumn 1, Issue , 1999, Pages 253-257

  Daniele, A ^a   Salapaka, S ^a   Salapaka, M V ^a   Dahleh, M ^a  

^a UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC FORCE MICROSCOPY; CONTROL SYSTEM SYNTHESIS; MATHEMATICAL MODELS; PARAMETER ESTIMATION; PIEZOELECTRIC DEVICES; SIGNAL DETECTION;

REFERENCE SIGNAL TRACKING;

SENSORS;

EID: 0033284471     PISSN: 07431619     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (9)