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Volumn 108, Issue 12, 2008, Pages 1551-1557
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Charge drives for scanning probe microscope positioning stages
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Author keywords
Atomic force microscopy (AFM); Scanning tunneling microscopy (STM); Tip scanning instrument design and characterization
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Indexed keywords
CLOSED LOOP CONTROL SYSTEMS;
ELASTICITY;
FEEDBACK;
HYSTERESIS;
PIEZOELECTRIC ACTUATORS;
SCANNING;
SENSOR NETWORKS;
SENSORS;
SPEED;
VOLTAGE REGULATORS;
ATOMIC FORCE MICROSCOPY (AFM);
CLOSED LOOPS;
CLOSED-LOOP CONTROLS;
FEED-BACK SENSORS;
HIGH-SPEED IMAGING;
NON LINEARITIES;
OPEN LOOPS;
POSITION SENSORS;
SCAN RANGE;
SCANNING PROBE MICROSCOPE;
SCANNING PROBE MICROSCOPES;
SCANNING TUNNELING MICROSCOPY (STM);
SENSOR NOISES;
TIP SCANNING INSTRUMENT DESIGN AND CHARACTERIZATION;
VOLTAGE AMPLIFIERS;
DRIVES;
AMPLIFIER;
ARTICLE;
ATOMIC FORCE MICROSCOPY;
BIOSENSOR;
FEEDBACK SYSTEM;
SCANNING ELECTRON MICROSCOPY;
SCANNING TUNNELING MICROSCOPY;
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EID: 53249121913
PISSN: 03043991
EISSN: None
Source Type: Journal
DOI: 10.1016/j.ultramic.2008.05.004 Document Type: Article |
Times cited : (82)
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References (13)
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