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Volumn 108, Issue 12, 2008, Pages 1551-1557

Charge drives for scanning probe microscope positioning stages

Author keywords

Atomic force microscopy (AFM); Scanning tunneling microscopy (STM); Tip scanning instrument design and characterization

Indexed keywords

CLOSED LOOP CONTROL SYSTEMS; ELASTICITY; FEEDBACK; HYSTERESIS; PIEZOELECTRIC ACTUATORS; SCANNING; SENSOR NETWORKS; SENSORS; SPEED; VOLTAGE REGULATORS;

EID: 53249121913     PISSN: 03043991     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.ultramic.2008.05.004     Document Type: Article
Times cited : (82)

References (13)


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.