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85034123152
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note
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Note that cantilevers with stiffer spring constants will have less thermal noise and may be detection noise limited. In this case adding reflector pads would help to improve sensitivity.
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19
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85034121152
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note
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In general, buffered HF does not etch silicon nitride at an appreciable rate. However, the plasma-enhanced-chemical-vapor-deposited silicon nitride which we used, did etch in buffered HF. This allowed us to selectively remove the plasma-enhanced silicon nitride, which acts as a passivation layer, without etching the cantilevers.
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5544283449
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T. E. Schäffer, J. P. Cleveland, F. Ohnesorge, D. A. Walters, and P. K. Hansma, J. Appl. Phys. 80, 3622 (1996).
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(1996)
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, vol.80
, pp. 3622
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Schäffer, T.E.1
Cleveland, J.P.2
Ohnesorge, F.3
Walters, D.A.4
Hansma, P.K.5
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25
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85034124094
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note
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The resonant frequencies of the longest two cantilevers were not measured in water because they were accidentally broken prior to measurement.
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26
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0042159869
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Oxford University Press, New York
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D. Sand, Scanning Force Microscopy: With Applications to Electric, Magnetic, and Atomic Forces, 2nd ed. (Oxford University Press, New York, 1994).
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(1994)
Scanning Force Microscopy: With Applications to Electric, Magnetic, and Atomic Forces, 2nd Ed.
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Sand, D.1
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30
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85034128776
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note
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These spectra were obtained with the following conditions. The deflection signal was low pass filtered at 300 kHz and digitized at 1 MHz for the large cantilever. The deflection signal was low pass filtered at 1 MHz and digitized at 2.5 MHz for the small cantilever.
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31
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85034153602
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The narrow 200-μm-long V-shaped silicon nitride cantilever sold by Digital Instruments, Santa Barbara, CA 93117
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The narrow 200-μm-long V-shaped silicon nitride cantilever sold by Digital Instruments, Santa Barbara, CA 93117.
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32
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85034123817
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note
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The assumption that the thermal spectrum is proportional to the cantilever response function is true if the thermal noise driving force is independent of frequency. Although we have not experimentally verified that the thermal noise driving force is independent of frequency, we are unaware of any measurements or theoretical prediction that would indicate this not being true for the bandwidth of interest here.
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