Design, identification, and control of a flexure-based XY stage for fast nanoscale positioning

IEEE Transactions on Nanotechnology

Volumn 8, Issue 1, 2009, Pages 46-54

  Yong, Yuen Kuan ^a   Aphale, Sumeet S ^a   Moheimani, S O Reza ^b  

^a UNIVERSITY OF NEWCASTLE   (Australia)

^b UNIVERSITY OF ABERDEEN   (United Kingdom)

Author keywords

Feedforward inversion; Integral resonant control (IRC); Mechanical design; Nanopositioning stage

Indexed keywords

DESIGN; PIEZOELECTRICITY; RELAY CONTROL SYSTEMS; RESONANCE; SCANNING; TOOLS;

CONTROL METHODS; CROSS COUPLINGS; DESIGN PROCESS; DOMINANT MODES; FEEDFORWARD INVERSION; FINITE-ELEMENT ANALYSIS; HIGH-SPEED; INTEGRAL RESONANT CONTROL (IRC); INVERSION TECHNIQUES; MECHANICAL DESIGN; MECHANICAL RESONANCE FREQUENCIES; NANOPOSITIONING STAGE; NANOSCALE POSITIONING; NON LINEARITIES; PIEZOELECTRIC STACKS; SCANNING SPEED; SINGLE INPUT SINGLE OUTPUTS; X-Y STAGES;

IDENTIFICATION (CONTROL SYSTEMS);

EID: 59049087212     PISSN: 1536125X     EISSN: None     Source Type: Journal    
DOI: 10.1109/TNANO.2008.2005829     Document Type: Article

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