High-bandwidth control of a piezoelectric nanopositioning stage in the presence of plant uncertainties

Nanotechnology

Volumn 19, Issue 12, 2008, Pages

  Aphale, Sumeet S ^a   Devasia, Santosh ^b   Reza Moheimani, S O ^a  

^a UNIVERSITY OF NEWCASTLE   (Australia)

^b UNIVERSITY OF WASHINGTON   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

BANDWIDTH; ELECTRONIC CIRCUIT TRACKING; FEEDBACK CONTROL; FEEDFORWARD CONTROL; NATURAL FREQUENCIES; PIEZOELECTRIC MATERIALS;

BANDWIDTH CONTROL; CHARGE ACTUATION; NANOPOSITIONING; PLANT UNCERTAINTIES;

NANOELECTRONICS;

ALGORITHM; ARTICLE; ELECTRICITY; ENVIRONMENTAL TEMPERATURE; HUMIDITY; HYSTERESIS; PIEZOELECTRICITY; PRIORITY JOURNAL; TECHNIQUE;

EID: 42549123694     PISSN: 09574484     EISSN: 13616528     Source Type: Journal    
DOI: 10.1088/0957-4484/19/12/125503     Document Type: Article

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