Iterative control approach to compensate for both the hysteresis and the dynamics effects of piezo actuators

IEEE Transactions on Control Systems Technology

Volumn 15, Issue 5 SPEC. ISS., 2007, Pages 936-944

  Wu, Ying ^a   Zou, Qingze ^a  

^a Iowa State University of Science and Technology   (United States)

Author keywords

Atomic force microscopy; Hysteresis; Iterative methods; Nanotechnology; Piezoelectric materials

Indexed keywords

AFM; ATOMIC-FORCE MICROSCOPIES; CASCADE MODELS; HIGH-SPEED; HYSTERESIS EFFECTS; INPUT-OUTPUT BEHAVIORS; ITERATIVE CONTROLS; NONLINEAR HYSTERESIS; PIEZO ACTUATORS; POSITIONING ERRORS; PRECISION POSITIONING; RANGE PRECISION; RATE-INDEPENDENT HYSTERESIS; VIBRATIONAL DYNAMICS;

ACTUATORS; ATOMIC FORCE MICROSCOPY; ATOMS; CONVERGENCE OF NUMERICAL METHODS; DYNAMICS; HYSTERESIS; MEMS; NANOTECHNOLOGY; PIEZOELECTRIC MATERIALS; PIEZOELECTRIC TRANSDUCERS; PIEZOELECTRICITY; SIGNAL INTERFERENCE; STREAM FLOW;

ITERATIVE METHODS;

EID: 49149125496     PISSN: 10636536     EISSN: None     Source Type: Journal    
DOI: 10.1109/TCST.2007.899722     Document Type: Article

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