Surface Chemical Composition and Morphology

Handbook of Silicon Wafer Cleaning Technology: Second Edition

Volumn , Issue , 2008, Pages 523-618

  Chabal, Yves J ^a   Higashi, Gregg S ^b   Small, Robert J ^c  

^a The University of Texas at Dallas   (United States)

^b APPLIED MATERIALS INC   (United States)

^c RS Associates   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

MAGNETIC MATERIALS;

SURFACE CHEMICAL COMPOSITION;

SILICON COMPOUNDS;

EID: 77649182420     PISSN: None     EISSN: None     Source Type: Book    
DOI: 10.1016/B978-081551554-8.50012-4     Document Type: Chapter

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