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Volumn 17, Issue 8-9 I, 2003, Pages 1261-1266
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Copper metalization using electroplating process
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Author keywords
[No Author keywords available]
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Indexed keywords
COPPER;
COPPER SULFATE;
AUGER ELECTRON SPECTROSCOPY;
CONFERENCE PAPER;
COST;
CRYSTAL;
ELECTRIC RESISTANCE;
ELECTRICITY;
ELECTRODE;
ELECTROPLATING INDUSTRY;
MAGNETIC FIELD;
OXIDATION;
PULSE GENERATOR;
SAFETY;
SCANNING ELECTRON MICROSCOPY;
TEMPERATURE;
WET DEPOSITION;
X RAY DIFFRACTION;
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EID: 0037763898
PISSN: 02179792
EISSN: None
Source Type: Journal
DOI: 10.1142/s0217979203018843 Document Type: Conference Paper |
Times cited : (2)
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References (9)
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