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Volumn 78, Issue 7, 2001, Pages 886-888

Atomic-level study of the robustness of the Si(100)-2X1:H surface following exposure to ambient conditions

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[No Author keywords available]

Indexed keywords


EID: 0008330122     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1348322     Document Type: Article
Times cited : (41)

References (21)
  • 14
    • 0346085146 scopus 로고    scopus 로고
    • The silicon samples were obtained from Montco Silicon Technologies, Inc., Royersford, PA 19468. The samples were nominally doped with Sb (resistivity = 0.005-0.02 Ω cm) and then subjected to a B predeposition diffusion at 975°C for 90 min.
    • The silicon samples were obtained from Montco Silicon Technologies, Inc., Royersford, PA 19468. The samples were nominally doped with Sb (resistivity = 0.005-0.02 Ω cm) and then subjected to a B predeposition diffusion at 975°C for 90 min.


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.