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Applied Surface Science

Volumn 107, Issue , 1996, Pages 90-94

Infrared observation of the hydrogenation of Si surface in deoxygenated water

(2) Watanabe, Satoru a Sugita, Yoshihiro a

a FUJITSU LABORATORIES LTD (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

CHEMICAL BONDS; COMPOSITION EFFECTS; HYDROGENATION; INFRARED SPECTROSCOPY; OXIDATION; OXIDES; SURFACE PHENOMENA; SURFACE STRUCTURE;

DISSOLVED OXYGEN CONCENTRATION (DOC); OXIDE REMOVAL; SILANOL GROUPS; WATER DEOXYGENATION;

SEMICONDUCTING SILICON;

EID: 0030566191 PISSN: 01694332 EISSN: None Source Type: Journal
DOI: 10.1016/S0169-4332(96)00498-9 Document Type: Article

Times cited : (6)

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