Hydrogen desorption from ion-roughened Si(100)

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 15, Issue 3, 1997, Pages 1129-1134

  Hess, G ^a   Russell, M ^a   Gong, B ^a   Parkinson, P ^a   Ekerdt, J G ^a  

^a The University of Texas at Austin   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ACTIVATION BARRIERS; COVERAGE RATIO; DIHYDRIDES; EDGE SITES; HIGH-RESOLUTION ELECTRON ENERGY LOSS SPECTROSCOPY; HYDROGEN ADSORPTION; HYDROGEN DESORPTION; ION IMPACT; LOW ENERGIES; MODE INTENSITY; MONOLAYER COVERAGE; ROUGH SURFACES; SI(1 0 0); SI(100) SURFACE; TERRACE SITES;

ELECTRON ENERGY LOSS SPECTROSCOPY; ENERGY DISSIPATION; GAS ADSORPTION; HYDROGEN; ION BOMBARDMENT; IONS; KRYPTON; MONOLAYERS; SILICON; SOIL CONSERVATION; TOOLS; VIBRATIONAL SPECTRA;

TEMPERATURE PROGRAMMED DESORPTION;

EID: 78649964067     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.580442     Document Type: Article

References (36)

1. Ch. Kleint, B. Hartmann, and H. Meyer, Z. Phys. Chem. (Leipzig) 250, 315 (1972).
2. K.-D. Brzoska and Ch. Kleint, Thin Solid Films 34, 131 (1976).
3. N. M. Russell and W. G. Breiland, J. Appl. Phys. 73, 3525 (1993).
4. J. H. Comfort and R. Reif, J. Electrochem. Soc. 136, 2386 (1989).
5. K.-J. Kim, M. Suemitsu, and N. Miyamoto, Appl. Phys. Lett. 63, 3358 (1993).
6. N. M. Russell, Dissertation, University of Texas at Austin, 1996.
7. G. Schulze and M. Henzler, Surf. Sci. 124, 336 (1983).
8. N. M. Russell and J. G. Ekerdt, Surf. Sci. 369, 199 (1996).
9. M. P. D'Evelyn, Y. L. Yang, and L. F. Sutcu, J. Chem. Phys. 99, 7038 (1993).
10. U. Hoefer, L. Li, and T. F. Heinz, Phys. Rev. B 45, 9485 (1992).
11. M. C. Flowers, N. B. H. Jonathan, Y. Liu, and A. Morris, J. Chem. Phys. 99, 7038 (1993).
12. K. W. Kolasinski, Int. J. Mod. Phys. B 9, 2753 (1995), and references therein.
13. G. Li, Y.-C. Chang, R. Tsu, and J. E. Greene, Surf. Sci. 330, 20 (1995).
14. K. Sinniah, M. G. Sherman, L. B. Lewis, W. H. Weinberg, J. T. Yates, and K. C. Janda, Phys. Rev. Lett. 62, 567 (1989).
15. C. J. Wu and E. A. Carter, Chem. Phys. Lett. 185, 172 (1991).
16. C. J. Wu, I. V. Ionova, and E. A. Carter, Surf. Sci. 295, 64 (1993).
17. G. A. Reider, U. Hoefer, and T. F. Heinz, J. Chem. Phys. 94, 4080 (1991).
18. P. Nachtigall, K. D. Jordan, and C. Sosa, J. Chem. Phys. 101, 8073 (1994).
19. C. C. Cheng and J. T. Yates, Phys. Rev. B 43, 4041 (1991).
20. L. Breaux, B. Anthony, T. Hsu, S. Banerjee, and A. Tasch, Appl. Phys. Lett. 55, 1885 (1989).
21. P. Bedrossian, Surf. Sci. 301, 223 (1994).
22. A. Mahajan, B. K. Kellerman, N. M. Russell, S. Banerjee, A. Campion, J. G. Ekerdt, A. Tasch, J. M. White, and D. J. Bonser, J. Vac. Sci. Technol. A 12, 2265 (1994).
23. H. Froitzheim, U. Koehler, and H. Lammering, Surf. Sci. 149, 537 (1985).
24. H. Froitzheim, H. Lammering, and H.-L. Guenter, Phys. Rev. B 27, 2278 (1983).
25. F. Stucki, J. A. Schaefer, J. R. Anderson, G. J. Lapeyre, and W. Goepel, Solid State Commun. 47, 795 (1983).
26. T. Angot, D. Bolmont, and J. J. Koulmann, Surf. Sci. 352, 401 (1994).
27. J. Boland, Surf. Sci. 261, 17 (1992).
28. X. R. Qin and P. R. Norton, Phys. Rev. B 53, 11 000 (1996).
29. M. L. Wise, B. G. Koehler, P. Gupta, P. A. Coon, and S. M. George, Mater. Res. Soc. Symp. Proc. 204, 319 (1991).
30. P. Gupta, V. L. Colvin, and S. M. George, Phys. Rev. B 37, 8234 (1988).
31. P. Dumas, Y. J. Chabal, and P. Jakob, Surf. Sci. 269/270, 867 (1992).
32. H. Chatham, D. Hils, R. Robertson, and A. Gallagher, J. Chem. Phys. 81, 1770 (1984).
33. 2 molecule occupied two surface sites.
34. S. M. Gates, C. M. Greenlief, D. B. Beach, and P. A. Holbert, J. Chem. Phys. 93, 7493 (1990).
35. J. E. Crowell and G. Lu, J. Electron. Spectrosc. Relat. Phenom. 54, 1045 (1990).
36. J. E. Crowell, G. Lu, and B. M. H. Ning, Mater. Res. Soc. Symp. Proc. 204, 253 (1991).