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Volumn 727, Issue , 1999, Pages 100-112

New routes toward chemical and photochemical vapor deposition of copper metal

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EID: 0041911544     PISSN: 00976156     EISSN: None     Source Type: Book Series    
DOI: 10.1021/bk-1999-0727.ch008     Document Type: Article
Times cited : (4)

References (58)
  • 1
    • 0348056529 scopus 로고    scopus 로고
    • (a) Singer, P. Semicond. Intl. 1997, 20 (No. 13, November), 67-70.
    • (1997) Semicond. Intl. , vol.20 , Issue.13 NOVEMBER , pp. 67-70
    • Singer, P.1
  • 2
    • 0042538887 scopus 로고    scopus 로고
    • IBM Corp., East Fishkill, NY, September
    • (b) "IBM introduces advanced chip technology", IBM Corp., East Fishkill, NY, September 1997 (http://www.chips.ibm.com/news/cmos7s.html).
    • (1997) IBM Introduces Advanced Chip Technology
  • 8
    • 0027590071 scopus 로고
    • Norman, J. A. T.; Muratore, B. A.; Dyer, P. N.; Roberts, D. A.; Hochberg, A. K. J. Phys. (Paris) IV, 1991, 1 (Coll. C2), 271. Norman, J. A. T.; Muratore, B. A.; Dyer, P. N.; Roberts, D. A.; Hochberg, A. K.; Dubois, L. H. Mater. Sci. Eng. 1993, B17, 87-92. Jain, A.; Chi, K.-M.; Kodas, T. T.; Hampden-Smith, M. J. J. Electrochem. Soc. 1993, 140, 1434-1439.
    • (1991) J. Phys. (Paris) IV , vol.1 , Issue.COLL. C2 , pp. 271
    • Norman, J.A.T.1    Muratore, B.A.2    Dyer, P.N.3    Roberts, D.A.4    Hochberg, A.K.5
  • 9
    • 0027542486 scopus 로고
    • Norman, J. A. T.; Muratore, B. A.; Dyer, P. N.; Roberts, D. A.; Hochberg, A. K. J. Phys. (Paris) IV, 1991, 1 (Coll. C2), 271. Norman, J. A. T.; Muratore, B. A.; Dyer, P. N.; Roberts, D. A.; Hochberg, A. K.; Dubois, L. H. Mater. Sci. Eng. 1993, B17, 87-92. Jain, A.; Chi, K.-M.; Kodas, T. T.; Hampden-Smith, M. J. J. Electrochem. Soc. 1993, 140, 1434-1439.
    • (1993) Mater. Sci. Eng. , vol.B17 , pp. 87-92
    • Norman, J.A.T.1    Muratore, B.A.2    Dyer, P.N.3    Roberts, D.A.4    Hochberg, A.K.5    Dubois, L.H.6
  • 10
    • 0027590071 scopus 로고
    • Norman, J. A. T.; Muratore, B. A.; Dyer, P. N.; Roberts, D. A.; Hochberg, A. K. J. Phys. (Paris) IV, 1991, 1 (Coll. C2), 271. Norman, J. A. T.; Muratore, B. A.; Dyer, P. N.; Roberts, D. A.; Hochberg, A. K.; Dubois, L. H. Mater. Sci. Eng. 1993, B17, 87-92. Jain, A.; Chi, K.-M.; Kodas, T. T.; Hampden-Smith, M. J. J. Electrochem. Soc. 1993, 140, 1434-1439.
    • (1993) J. Electrochem. Soc. , vol.140 , pp. 1434-1439
    • Jain, A.1    Chi, K.-M.2    Kodas, T.T.3    Hampden-Smith, M.J.4
  • 15
    • 4243427738 scopus 로고
    • Nozari, M. S.; Drago, R. S. Inorg. Chem. 1972, 11, 280-283. McMillin, D. R.; Drago, R. S.; Nusz, J. A. J. Am. Chem. Soc. 1976, 98, 3120-3126.
    • (1972) Inorg. Chem. , vol.11 , pp. 280-283
    • Nozari, M.S.1    Drago, R.S.2
  • 21
    • 0027659267 scopus 로고
    • Rana, V. V. S.; Joshi, R. V.; Ohdomari, I., Eds.; Materials Research Society: Pittsburgh, PA
    • Awaya, N.; Arita, Y. In: Advanced Metalization for ULSI Applications in 1991, Rana, V. V. S.; Joshi, R. V.; Ohdomari, I., Eds.; Materials Research Society: Pittsburgh, PA, 1992; p. 345. Awaya, N.; Arita, N. Jpn. J. Appl. Phys. (1) 1993, 32, 3915-3919.
    • (1992) Advanced Metalization for ULSI Applications in 1991 , pp. 345
    • Awaya, N.1    Arita, Y.2
  • 22
    • 0027659267 scopus 로고
    • Awaya, N.; Arita, Y. In: Advanced Metalization for ULSI Applications in 1991, Rana, V. V. S.; Joshi, R. V.; Ohdomari, I., Eds.; Materials Research Society: Pittsburgh, PA, 1992; p. 345. Awaya, N.; Arita, N. Jpn. J. Appl. Phys. (1) 1993, 32, 3915-3919.
    • (1993) Jpn. J. Appl. Phys. (1) , vol.32 , pp. 3915-3919
    • Awaya, N.1    Arita, N.2
  • 23
    • 0042038039 scopus 로고
    • Smith, G. C.; Blumenthal, R., Eds.; Materials Research Society: Pittsburgh, PA
    • Cho, C.-C. In: Tungsten and Other Advanced Metals for ULSI Applications in 1990; Smith, G. C.; Blumenthal, R., Eds.; Materials Research Society: Pittsburgh, PA, 1991; p. 189. Cho, C.-C. U. S. Patent 5,087,485 (1992).
    • (1991) Tungsten and Other Advanced Metals for ULSI Applications in 1990 , pp. 189
    • Cho, C.-C.1
  • 24
    • 0043039663 scopus 로고    scopus 로고
    • U. S. Patent 5,087,485 (1992)
    • Cho, C.-C. In: Tungsten and Other Advanced Metals for ULSI Applications in 1990; Smith, G. C.; Blumenthal, R., Eds.; Materials Research Society: Pittsburgh, PA, 1991; p. 189. Cho, C.-C. U. S. Patent 5,087,485 (1992).
    • Cho, C.-C.1
  • 29
    • 0031677830 scopus 로고    scopus 로고
    • The mechanism presented by these authors, shown here in somewhat simplified form, also included the inhibiting effect of added hfacH on the reaction
    • (c) Borgharkar, N. S.; Griffin, G. L. J. Electrochem. Soc. 1998, 145, 347-352. The mechanism presented by these authors, shown here in somewhat simplified form, also included the inhibiting effect of added hfacH on the reaction.
    • (1998) J. Electrochem. Soc. , vol.145 , pp. 347-352
    • Borgharkar, N.S.1    Griffin, G.L.2
  • 30
    • 0001505134 scopus 로고
    • (a) Dissociative adsorption of alcohols on Cu: Bowker, M.; Madix, R. J. Surf. Sci. 1980, 95, 190-206. Russell, J. N., Jr.; Gates, S. M.; Yates, J. T., Jr. Surf. Sci. 1985, 163, 516-540.
    • (1980) Surf. Sci. , vol.95 , pp. 190-206
    • Bowker, M.1    Madix, R.J.2
  • 31
    • 0000961491 scopus 로고
    • (a) Dissociative adsorption of alcohols on Cu: Bowker, M.; Madix, R. J. Surf. Sci. 1980, 95, 190-206. Russell, J. N., Jr.; Gates, S. M.; Yates, J. T., Jr. Surf. Sci. 1985, 163, 516-540.
    • (1985) Surf. Sci. , vol.163 , pp. 516-540
    • Russell J.N., Jr.1    Gates, S.M.2    Yates J.T., Jr.3
  • 34
    • 0003972370 scopus 로고    scopus 로고
    • Neutral thermochemical data
    • Mallard, W. G.; Linstrom, P. J., Eds. August National Institute of Standards and Technology, Gaithersburg MD 20899
    • Afeefy, H. Y.; Liebman, J. F.; Stein, S. E. "Neutral Thermochemical Data"; In: NIST Standard Reference Database Number 69; Mallard, W. G.; Linstrom, P. J., Eds. August 1997, National Institute of Standards and Technology, Gaithersburg MD 20899 (http://webbook.nist.gov).
    • (1997) NIST Standard Reference Database , vol.69
    • Afeefy, H.Y.1    Liebman, J.F.2    Stein, S.E.3
  • 35
    • 0003998388 scopus 로고    scopus 로고
    • CRC Press: Boca Raton, FL, and references therein
    • Lide, D. R., Ed.; CRC Handbook of Chemistry and Physics; 77th Ed.; CRC Press: Boca Raton, FL, 1996; and references therein. Some values in these tables are based on enthalpies of combustion and vaporization in: Weast, R. C., Ed.; CRC Handbook of Chemistry and Physics; 62nd Ed.; CRC Press: Boca Raton, FL, 1981.
    • (1996) CRC Handbook of Chemistry and Physics; 77th Ed.
    • Lide, D.R.1
  • 36
    • 0003998388 scopus 로고    scopus 로고
    • CRC Press: Boca Raton, FL
    • Lide, D. R., Ed.; CRC Handbook of Chemistry and Physics; 77th Ed.; CRC Press: Boca Raton, FL, 1996; and references therein. Some values in these tables are based on enthalpies of combustion and vaporization in: Weast, R. C., Ed.; CRC Handbook of Chemistry and Physics; 62nd Ed.; CRC Press: Boca Raton, FL, 1981.
    • (1981) CRC Handbook of Chemistry and Physics; 62nd Ed.
    • Weast, R.C.1
  • 38
    • 0000065379 scopus 로고
    • Acid-base behaviour
    • Covington, A. K; Dickinson, T., Eds.; Plenum: London, Ch. 3
    • King, E. J. "Acid-base behaviour"; In: Physical Chemistry of Organic Solvent Systems; Covington, A. K; Dickinson, T., Eds.; Plenum: London, 1973; Ch. 3.
    • (1973) Physical Chemistry of Organic Solvent Systems
    • King, E.J.1
  • 39
    • 0004052732 scopus 로고    scopus 로고
    • Proton affinity evaluation
    • Mallard, W. G.; Linstrom, P. J., Eds. August National Institute of Standards and Technology, Gaithersburg MD 20899
    • Hunter, E. P.; Lias, S. G. "Proton Affinity Evaluation"; In: NIST Standard Reference Database Number 69; Mallard, W. G.; Linstrom, P. J., Eds. August 1997, National Institute of Standards and Technology, Gaithersburg MD 20899 (http://webbook.nist.gov).
    • (1997) NIST Standard Reference Database , vol.69
    • Hunter, E.P.1    Lias, S.G.2
  • 47
    • 37049048572 scopus 로고
    • Häfelinger, G.; Steinmann, L. Angew. Chem. Int. Ed. Engl. 1977, 16, 47-48. Jackman, L. M.; Packham, D. I. Proc. Chem. Soc. 1957, 349-350.
    • (1957) Proc. Chem. Soc. , pp. 349-350
    • Jackman, L.M.1    Packham, D.I.2


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