Real-time displacement measurements with a Fabry-Perot cavity and a diode laser

Precision Engineering

Volumn 25, Issue 4, 2001, Pages 321-335

  Howard, Lowell ^a   Stone, Jack ^a   Fu, Joe ^a  

^a NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY   (United States)

Author keywords

AFM; Diode laser; Fabry Perot interferometer; Microwave frequency counter; Nanometrology; Optical heterodyne frequency measurement; Optical mixing errors

Indexed keywords

ACTUATORS; FABRY-PEROT INTERFEROMETERS; HETERODYNING; IMAGE RECONSTRUCTION; MECHANICAL DRIVES; OPTICAL COMMUNICATION; OPTICAL VARIABLES MEASUREMENT; PROXIMITY SENSORS; REAL TIME SYSTEMS; SEMICONDUCTOR LASERS;

OPTICAL HETERODYNE FREQUENCY MEASUREMENTS; OPTICAL MIXING ERRORS;

INTERFEROMETRY;

EID: 0035479574     PISSN: 01416359     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0141-6359(01)00086-1     Document Type: Article

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