Relativistic corrections in displacement measuring interferometry

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 18, Issue 6, 2000, Pages 3277-3281

  Heilmann, Ralf K ^a   Konkola, Paul T ^a   Chen, Carl G ^a   Schattenburg, Mark L ^a  

^a MASSACHUSETTS INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

DISTANCE MEASUREMENT; DOPPLER EFFECT; INTERFEROMETRY; VELOCITY MEASUREMENT;

MODEL VELOCITY PROFILES;

ELECTRON BEAM LITHOGRAPHY;

EID: 0034314804     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.1313584     Document Type: Article

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3. F. C. Demarest, Meas. Sci. Technol. 9, 1024 (1998).
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