Design of a microactuator array against the coupled nature of microelectromechanical systems (MEMS) processes

CIRP Annals - Manufacturing Technology

Volumn 49, Issue 1, 2000, Pages 101-104

  Kim, S G ^a   Koo, M K ^a  

^a Daewoo Electronics Co   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

MICROACTUATORS; MICROELECTROMECHANICAL DEVICES; MICROMACHINING; PIEZOELECTRIC DEVICES; THIN FILM DEVICES;

AXIOMATIC DESIGN; PIEZOELECTRIC MICROMIRROR ARRAY;

PRODUCT DESIGN;

EID: 0033720348     PISSN: 00078506     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0007-8506(07)62905-9     Document Type: Article

References (7)

1. MEMS Exchange, "What is MEMS Technology", www.mems_exchange.org
2. N.P. Suh, The Principles of Design, Oxford University Press, 1990
3. N.P. Suh, S. Sekimoto, "Design of Thinking Design Machine", Annals of the CIRP, Vol. 39, No.1, 1990
4. S.J. Kim, N.P. Suh, S.G. Kim, "Design of Software System based on Axiomatic Design", Annals of CIRP, Vol. 40, No. 1, 1991
5. S. G. Kim, K. H. Hwang, Y. J. Choi, Y. K. Min, and J. M. Bae, "Micromachined Thin-Film Mirror Array for Reflective Light Modulation," Annals of the CIRP, Vol. 46, No. 1, pp.455-458, 1997.
6. Sang-Gook Kim, Kyu-Ho Hwang, Jin Hwang, Myung-Kwon Koo, and Keun-Woo Lee, "Actuated Mirror Array - A New Chip-based Display Device for the Large Screen Display", SID International Display Research Conference, Seoul, September 1998, pp. 329-998.
7. Sang-Gook Kim and Kyu-Ho Hwang, "Recent progresses of Thin-film Micromirror Array (TMA)", Proc. of international Display Workshop, Sendai, Japan, December 1999. (Invited Paper)