A surface motor-driven planar motion stage integrated with an XYθZ surface encoder for precision positioning

Precision Engineering

Volumn 28, Issue 3, 2004, Pages 329-337

  Gao, Wei ^a   Dejima, Shuichi ^a   Yanai, Hiroaki ^a   Katakura, Kei ^a   Kiyono, Satoshi ^a   Tomita, Yoshiyuki ^b  

^a TOHOKU UNIVERSITY   (Japan)

^b SUMITOMO HEAVY INDUSTRIES LTD   (Japan)

Author keywords

Planar motion stage; Precision positioning; Surface encoder; Surface motor

Indexed keywords

ELECTRIC MOTORS; INTERFEROMETRY; PRECISION ENGINEERING; PRESSURE EFFECTS; STATORS; TEMPERATURE MEASUREMENT;

PLANAR MOTION STAGE; PRECISION POSITIONING; SURFACE ENCODERS; SURFACE MOTORS;

SIGNAL ENCODING;

EID: 2942711839     PISSN: 01416359     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.precisioneng.2003.12.003     Document Type: Article

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