Measuring shape and deformation of small objects using digital holography

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3479, Issue , 1998, Pages 104-115

  Seebacher, Soenke ^a   Osten, Wolfgang ^a   Jüptner, Werner P O ^a  

^a BIAS BREMER INSTITUT FÜR ANGEWANDTE STRAHLTECHNIK GMBH   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

CHARGE COUPLED DEVICES; COMPUTER GENERATED HOLOGRAPHY; DATA RECORDING; DEFORMATION; HOLOGRAPHY; INTERFEROMETERS; INTERFEROMETRY; LASER RECORDING; MATERIALS PROPERTIES; OPTOELECTRONIC DEVICES; SYSTEMS ENGINEERING; THREE DIMENSIONAL;

CCD MATRIXES; CONTACTLESS METHODS; DIGITAL HOLOGRAPHIES; HIGHLY SENSITIVES; HOLOGRAPHIC RECORDINGS; INTERFERENCE PHASE; LATERAL EXTENSIONS; MECHANICAL LOADS; MICRO BEAMS; NEW TECHNIQUES; OPTICAL SETUPS; OPTICAL-; RECONSTRUCTION PROCESSES; ROBUST METHODS; SET-UPS; SHAPE ANALYSIS; YOUNG'S MODULUS;

HOLOGRAPHIC INTERFEROMETRY;

EID: 57649134431     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.316439     Document Type: Conference Paper

References (12)

1. th Internat. UACEM Symp., SEM, Bethel, CT, 1993
2. S. Seebacher, W. Osten and W.Jüptner, "3D-Deformation analysis of microcomponents using digital holography", Proc. SPIE Vol.3098(1997), pp. 382-391
3. U. Schnars, Direct phase determination in hologram interferometry with use of digitally recorded holograms, JOSA Vol. 1 1, No. 7, July 1994
4. S. Seebacher, W. Osten and W. Jüptner, "Measuring shape, deformation and vibration of micro components using digital holography", Proc. Micro Mat, Berlin 1997, pp 230-234
5. W. Jüptner, M. Kujawinska, W. Osten, L. Salbut, S. Seebacher; Combined Measurement of Silicon Microbeams by Grating Interferometry and Digital Holography; Proceedings International Conference on Applied Optical Metrology; Akadenue Verlag 1998
6. T.H.Demetrakopoulos and R.Mittra, Digital and Optical Reconstruction from Sub-optical Diffraction Patterns, Appl. Optics, Vol. 13, No.3, 1974
7. Th. Kreis, Holographic Interferometry, Akademie Verlag, 1996
8. W. Osten; Some considerations on the statistical Error Analysis in Holographic Interferometry with Application to an Optimized Interferometer; Optical Acta Vol. 32 No. 7 (1985), p. 827-838
9. Yu. I. Ostrowsky, V.P. Shchepinov, V.V. Yakovlev; Holographic Interferometry in Experimental Mechanics; Springer Series in Optical Sciences Vol. 60; Springer Verlag 1990
10. W. Osten, W. Jüptner, "Measurement of displacement vector fields of extended objects," Opt. & Lasers in Eng. 24(1996), 261-285
11. G. Wernicke, W. Osten, Holographische Interferometrie, Physik-Verlag, Weinheim 1982
12. W. Beitz, Dubbel, Springer Verlag