Study of a small-sized ultrasonic probe

CIRP Annals - Manufacturing Technology

Volumn 55, Issue 1, 2006, Pages 567-570

  Hidaka, K ^a  

^a Mitutoyo Research Center Europe   (Netherlands)

Author keywords

Probe; Sensor; Ultrasonic

Indexed keywords

ALGORITHMS; ASPECT RATIO; MICROMETERS; NATURAL FREQUENCIES; SENSORS;

FORCE SENSOR; NEWTON MEASURING FORCE; PROFILING MEASUREMENT; ULTRASONIC PROBE;

ULTRASONIC TESTING;

EID: 33750073872     PISSN: 00078506     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0007-8506(07)60484-3     Document Type: Article

References (5)

1. Haitjema H., Pril W., Schellekens P. 2001 Development of a Silicon-Based Nanoprobe System for 3-D Measurements. Annals of CIRP, 50/1, p. 365-368.
2. Peggs G., Lewis A., Oldfield S. 1999, Design of a Compact High-Accuracy CMM, Annals of CIRP, 48/1, p. 417-420.
3. th annual meeting of the Micro Electro Mechanical Systems, Japan p. 217-220.
4. Nobuhiro Ishikawa, Kazuhiko Hidaka, Kunitoshi Nishimura, 1998, High-speed touch signal processing for touch signal probe, Proceedings of annual autumn meeting of the Japan Society for Precision Engineering, M22; p531.
5. Seikiti Miyagi, 1942, Glass to metal seal, Corona Co book, Japan p. 37.