A new vacuum interferometric comparator for calibrating the fine linear encoders and scales

Precision Engineering

Volumn 28, Issue 3, 2004, Pages 320-328

  Sawabe, M ^a   Maeda, F ^a   Yamaryo, Y ^a   Simomura, T ^a   Saruki, Y ^a   Kubo, T ^a   Sakai, H ^a   Aoyagi, S ^a  

^a MITUTOYO CORPORATION   (Japan)

Author keywords

Calibration; Edge sensor; He Ne laser; Linear encoder; Standard scale; Uncertainty of measurement; Vacuum interferometer

Indexed keywords

HELIUM NEON LASERS; INTERFEROMETRY; LIGHT POLARIZATION; LINEAR SYSTEMS; REFRACTIVE INDEX; SENSORS; SIGNAL ENCODING;

EDGE SENSORS; LINEAR ENCODERS; STANDARD SCALE; UNCERTAINTY OF MEASUREMENT; VACUUM INTERFEROMETERS;

VACUUM APPLICATIONS;

EID: 2942737389     PISSN: 01416359     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.precisioneng.2003.11.007     Document Type: Article

References (6)

1. Noguchi H., Saruki Y. The Development of an interferometer for calibrating linear scales. Mitutoyo Tech. Bull. 5:1989;26-36.
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3. Yoshiike K. The measurement environment nine meters underground, Mitutoyo technical information no. STD-008; 1990.
4. Sawabe M, Ohta S, Hiroshima S. Traceability of optical length measurements. In: Proceedings of SPIE Vol. 954, Optical Testing and Metrology II. Dearborn, USA: 1988. p. 448-54.
5. Ueda M, Numata A, Sawabe M. Calibrated wavelength results of commercial stabilized He-Ne leasers. In: Proceeding of 1997 National Conference of Standard Laboratory. Atlanta, USA: 1997. p. 775-84.
6. Israel W., Tirmann I., Metz G., Yamaryo Y., Maeda F., Simomura T. An international length comparison at an industrial level using a photoelectric incremental encoder as transfer standard. Precision Eng. 27:2003;151-156.