Profiles of a high-aspect-ratio grating determined by spectroscopic scatterometry and atomic-force microscopy

Applied Optics

Volumn 45, Issue 14, 2006, Pages 3201-3212

  Garnaes, J ^a   Hansen, P E ^b   Agersnap, N ^b   Holm, J ^c   Borsetto, F ^a   Kuhle A ^a  

^a DANISH FUNDAMENTAL METROLOGY   (Denmark)

^b LuKa OptoScope   (Denmark)

^c Ibsen Photonics   (Denmark)

Author keywords

[No Author keywords available]

Indexed keywords

ASPECT RATIO; ATOMIC FORCE MICROSCOPY; IMAGE PROCESSING; OPTICAL MICROSCOPY; SCANNING ELECTRON MICROSCOPY; SPECTROSCOPIC ANALYSIS;

GRATING PROFILE; HIGH-ASPECT-RATIO GRATING; OPTICAL DIFFRACTION MICROSCOPY; TILT ANGLES;

DIFFRACTION GRATINGS;

EID: 33745774778     PISSN: 1559128X     EISSN: 15394522     Source Type: Journal    
DOI: 10.1364/AO.45.003201     Document Type: Article

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