Traceable profilometry with a 3D nanopositioning unit and zero indicating sensors in compensation method

Journal of Physics: Conference Series

Volumn 13, Issue 1, 2005, Pages 228-231

  Hoffmann, J ^a   Weckenmann, A ^a  

^a UNIVERSITY OF ERLANGEN NUREMBERG   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 24644521180     PISSN: 17426588     EISSN: 17426596     Source Type: Conference Proceeding    
DOI: 10.1088/1742-6596/13/1/053     Document Type: Conference Paper

References (5)

1. Hausotte T 2002 Nanopositionier- und Nanomessmaschine Doctoral Thesis Techn. Univ. Ilmenau
2. Mastylo R, Manske E and Jaeger G 2004 Development of a focus sensor and its integration into the nanopositioning and nanomeasuring machine Proc. OPTO 2004, 25th-27 May 2004, Nuremberg, Germany
3. Weckenmann A, Peggs, G and Hoffmann J 2005 Probing Systems for Dimensional Micro and Nano Metrology Meas. Sci. Technol. to be published
4. Weckenmann A and Hoffmann J 2005 Multisensorics for Nanometrology EUROMET workshop μCMM (METAS Bern, 7-8 April 2005)
5. Lim J S 1990 Two-Dimensional Signal and Image Processing (Englewood Cliffs, NJ, Prentice Hall) p 469-76