State of the art of micromachining

CIRP Annals - Manufacturing Technology

Volumn 49, Issue 2, 2000, Pages 473-488

  Masuzawa, T ^a  

^a INSTITUTE OF INDUSTRIAL SCIENCE   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

MICROELECTROMECHANICAL DEVICES; MINIATURE INSTRUMENTS; PRODUCT DEVELOPMENT; PRODUCTION ENGINEERING; TECHNOLOGY TRANSFER;

MICRO-PRODUCT; MICRO-TECHNOLOGY; MINIATURIZATION;

MICROMACHINING;

EID: 0034516353     PISSN: 00078506     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0007-8506(07)63451-9     Document Type: Article

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