Advanced electron microscopy needs for nanotechnology and nanomanufacturing

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 23, Issue 6, 2005, Pages 3015-3022

  Postek, Michael T ^a   Villarrubia, John S ^a   Vladár, András E ^a  

^a NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

DIMENSIONAL METROLOGY; MEASUREMENT TOOLS; NANOMANUFACTURING; NANOMATERIALS;

ARRAYS; DIMENSIONAL STABILITY; MICROELECTRONICS; NANOSTRUCTURED MATERIALS; NANOTECHNOLOGY; SCANNING ELECTRON MICROSCOPY;

ELECTRON MICROSCOPY;

EID: 29044439547     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.2135795     Document Type: Article

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