Combined optical and X-ray interferometry for high-precision dimensional metrology

Proceedings of the Royal Society A: Mathematical, Physical and Engineering Sciences

Volumn 456, Issue 1995, 2000, Pages 701-729

  Basile, G ^a   Becker, P ^a   Bergamin, A ^a   Cavagnero, G ^a   Franks, A ^a   Jackson, K ^a   Kuetgens, U ^a   Mana, G ^a   Palmer, E W ^a   Robbie, C J ^a   Stednan, M ^a   Stumpel J ^a   Yacoot, A ^a   Zosi, G ^a  

^a NATIONAL PHYSICAL LABORATORY   (United Kingdom)

Author keywords

Calibration; Nanometrology; Optical interferometer; Traceability; X ray interferometer; X ray optics

Indexed keywords

EID: 33746390088     PISSN: 13645021     EISSN: None     Source Type: Journal    
DOI: 10.1098/rspa.2000.0536     Document Type: Article

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