Investigations of Nanoroughness Standards by Scanning Force Microscopes and Interference Microscope

Nanoscale Calibration Standards and Methods: Dimensional and Related Measurements in the Micro-and Nanometer Range

Volumn , Issue , 2006, Pages 269-281

  Kruger Sehm R ^a   Dziomba, T ^a   Dai, G ^a  

^a PHYSIKALISCH TECHNISCHE BUNDESANSTALT   (Germany)

Author keywords

Calibration; Instrumentation; Interference microscope; Investigations of nanoroughness standards; Manufacturing of calibration specimens; Measurements; Methods; Nanoscale calibration standards; Scanning force microscopes; Standards for nanometrology

Indexed keywords

EID: 73149095942     PISSN: None     EISSN: None     Source Type: Book    
DOI: 10.1002/3527606661.ch20     Document Type: Chapter

References (9)

1. L. Koenders and G. Wilkening, in International Comparison on Nanometrology: Step Height (NANO 2) Proceedings of XI International Colloquium on Surfaces (Chemnitz, 2-3 February 2004), pp. 139-145.
2. DIN EN ISO 4288, Rules and Procedures for the Assessment of Surface Texture (1998).
3. ISO 5436-1, Geometrical Product Specifications (GPS) -Surface Texture: Profile Method; Measurement Standards -Part 1: Material Measures.
4. W. Hillmann et al., Superfeine Raunormale (Superfine Roughness Standards). Qualität und Zuverlässigkeit (Carl Hanser Verlag, München 1997), Vol. 42.
5. R. Krüger-Sehm and J. A. Luna Perez, Proposal for a guideline to calibrate interference microscopes for use in roughness measurement, Int. J. Mach. Tools Manuf. 41, 2123-2138 (2001).
6. H. H. Gatzen and J.C Maetzig, Nanogrinding. Precision Engineering (Elsevier, Oxford, September-December 1997), Vol. 21, pp. 134-139 (Engl.).
7. ISO 4287, Geometrical Product Specifications (GPS) -Surface Texture: Profile Method -Terms, Definitions and Surface Texture Parameters.
8. "SPIP": Trademark of Evaluation Software by J. F. Joergensen, Image Metrology, Denmark, www.imagemet.com.
9. G. Dai, F. Pohlenz, H.-U. Danzebrink, R. Krüger-Sehm, and K. Hasche, Metrological scanning force microscopy applicable for surface evaluations, in Proceedings of XI. International Colloquium on Surfaces, Chemnitz (Part II, 2-3 February 2004), pp. 1-10.