Fabrication of micropumps with Q-switched ND:YAG-lasers

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4426, Issue , 2002, Pages 195-202

  Mai, Tuan Anh ^a   Nguyen, Nam Trung ^a  

^a SINGAPORE INSTITUTE OF MANUFACTURING TECHNOLOGY   (Singapore)

Author keywords

Copper; Laser; Microfluidics; Micromachining; Micromixers; Micropumps

Indexed keywords

COPPER; FABRICATION; LASER ABLATION; MICROELECTROMECHANICAL DEVICES; MICROMACHINING; Q SWITCHED LASERS; SCANNING; SUBSTRATES; SURFACE ROUGHNESS;

MICROFLUIDICS;

NEODYMIUM LASERS;

EID: 0036383169     PISSN: 0277786X     EISSN: None     Source Type: Journal    
DOI: 10.1117/12.456871     Document Type: Article

References (17)

1. Koch, M., Harris, N., Evans, A.G.R., White, N.M., Brunnschweiler, A., "A novel micromachined pump based on thick-film piezoelectric actuation", Sensors and Actuators A, 1998, Vol. 70, pp. 98-103.
2. Maillefer, D., van Lintel, H., Rey-Mermet, G., Hirschi, R., "A high-performance silicon micropump for an implantable drug delivery system", 1999, IEEE 12th Int. Workshop on MEMS (MEMS '99), pp. 541-546.
3. Dario, P., Croce, N., Carrozza, M.C., Varallo, G., "A fluid handling system for a chemical microanalyzer", J. Micromech. Microeng., 1996, Vol. 6, pp. 95-98.
4. Boehm, S., Olthuis, W., Bergveld, P., "A plastic micropump constructed with conventional techniques and materials", Sensors and Actuators A, 1999, Vol. 77, pp. 223-228.
5. Gillner, A., Hellrung, D., Poprawe, P., "Microstructuring with Nd:YAG-lasers", Laser Assisted Net Shape Enginnering 2, LANE'97, 1997, pp. 561 -570.
6. Exner, H., Keiper, B., Meja, P., "Microstructuring of materials by pulsed laser focusing and projection technique", SPIE Conference, San Jose, Jan 1999.
7. Toenshoff, H.K., von Alvensleben, F., Waiss, J.W., "Precise machining of materials by deep UV lasers", Proc. 9IPES UME4, 1997, Braunschweig, pp. 648-654.
8. 2 lasers", Applied Surface Science 46 (1990).
9. Ederer, I., Scherdel, S., Schurullus, W., Tille, C., "Manufacturing of fluid mechanical microstructures in silicon by Nd:YAG laser ablation", Conf. Proc. Micro System technologies, Potsdam, 1996, pp. 759-761.
10. Korte, F., Nolte S., Chichkov, B.N., Bauer, T., Kamlage, G., Wagner, T., Fallnich, C., Welling, H., "Far-field and nier-field material processing with femtosecond laser pulses", Appl. Phys., 1999, A 69, pp. 7-11.
11. nd edition, Springer, 1996.
12. Ritsko, J.J., Laser Etching in "Laser Microfabrication, Thin Film Processes and Lithography", edited by Ehrlich and Tsao, Acadmic Press, Inc., 1989.
13. Schubart, D., Otto, A., "Process development of laser melt ablation", Laser Assisted Net Shape Enginnering 2, Proc. LANE'97, 1997, pp. 865-876.
14. Ohmura, E., Fukumoto, I., Miyamoto, I., "Molecular dynamics simulation on laser ablation and thermal shock phenomena", Proc. ICALEO'98, 1998, Orlando, pp. 45-54.
15. Chichkov, B., Momma, C., von Alvensleben, F., Tunnerman, A., "Femtosecond, picosecond and nanosecond laser ablation of solids", Appl. Phys. A, Vol. 63, 1996, pp. 109-115.
16. Knowles, M.R.H., Rutterford G., Bell, A.I., Andrews, A.J., Foster-Tuner, G., Kearsley, A.J., "Sub-micron and high precision micro-machining using nanosecond lasers", Proc. ICALEO'98, 1998, pp. 112-120.
17. Luft, A., Franz, U., Emsermann, A., Kaspar, J., "A study of thermal and mechanical effects on materials induced by pulsed laser drilling", Appl. Phys. A, Vol. 63, 1996, pp. 93-101.