Coordinate Measurements in Microsystems by Using AFM-Probing: Problems and Solutions

Nanoscale Calibration Standards and Methods: Dimensional and Related Measurements in the Micro-and Nanometer Range

Volumn , Issue , 2006, Pages 60-72

  Hüser, Dorothee ^a   Petersen, Ralph ^a   Rothe, Hendrik ^a  

^a HELMUT SCHMIDT UNIVERSITY   (Germany)

Author keywords

AFM probing; Coordinate measurements in microsystems; Instrumentation; Long range scanning probe microscope; Methods; Nanoscale calibration standards; Realizing CMMs for microsystems

Indexed keywords

EID: 84889612616     PISSN: None     EISSN: None     Source Type: Book    
DOI: 10.1002/3527606661.ch5     Document Type: Chapter

References (17)

1. U. Brand, T. Kleine-Besten, and H. Schwenke, Development of a special CMM for dimensional metrology on microsystem components, in ASPE Confonference, Scottsdale, AZ, USA, 22th-27th Oct. 2000, pp. 542-546.
2. S. Bütefisch, S. Büttgenbach, T. Kleine-Besten, and U. Brand, Silicon three-axial tactile sensor for micromaterial characterization, J. Micro Syst. Technol. (2000).
3. P. Schellekens, 3D probe, CIRP Ann. 1 (50), 365-368 (2001).
4. E. Trapet (Inventor) and W. Messtechnik GmbH (Announcer), Taster zur Messung geometrischer Strukturen, German Patent: DE 197 24 739 A 1, 1998.
5. H. Schwenke, C. Weiskirch, and H. Kunzmann, Opto-taktiler Sensor für die 2D-und 3D-Messung kleiner Strukturen auf Koordinatenmegeräten, Technisches Messen 12 (1999).
6. K. Takamasu, M. Hiraki, K. Enami, and S. Ozono, Development of nano-CMM and parallel-CMM - CMM in the 21st century, in International Dimensional Metrology Workshop, Tennessee, USA, May 1999.
7. M. Holmes, R. Hocken, and D. Trumper, The long-range scanning stage: a novel platform for scanning-probe microscopy, Precision Eng. 24, 191-209 (2000).
8. T. Hausotte, Nanopositionier-und Nanomessmaschine, Verlag ISLE, Diss., TU Ilmenau, 2002.
9. H. Rothe, D. Hüser, and R. Petersen, Simulation of the dynamic behaviour of a nanometer coordinate measuring machine, in Proceedings of the 4th Seminar on Quantitative Microscopy: Dimensional Measurements in the Micro-and Nanometer Range, PTB-Bericht, vol. PTB-F-39, edited by K. Hasche, W. Mirandé, and G. Wilkening, 2000.
10. R. Petersen, H. Rothe, and D. Hüser, Large area AFM-scans with the nanometer coordinate measuring machine, in Proceedings of the 5th Seminar on Quantitative Microscopy: Dimensional Measurements in the Micro-and Nanometer Range, PTB-Bericht, vol. PTB-F-44, edited by K. Hasche, W. Mirandé, and G. Wilkening (Bergisch Gladbach, Nov. 2001).
11. R. Petersen and H. Rothe, One way to accomplish the advanced requests of nanometrology: the nanometer coordinate measuring machine (NCMM), in Advanced Characterization Techniques for Optics, Semiconductor, and Nanotechnologies, Proc. SP/E, no. 5188-29, edited by A. Duparré and B. Singh, 2003.
12. A. Müller and H. Rothe, Optimization of controller parameter of a coordinate measuring machine, in 6th US National Congress on Computational Mechanics (USNCCM), Dearborn, Detroit, August 2001.
13. R. Petersen, Theoretische und experimentelle Untersuchungen zur Koordinatenmesstechnik in der Nanometrologie, Shaker Verlag, Diss., Universität der Bundeswehr Hamburg, 2003.
14. D. Hüser, H. Rothe, and R. Petersen, Recognizing objects in dimensional micro-metrology, in Proceedings of the 4th Seminar on Quantitative Microscopy: Dimensional Measurements in the Microand Nanometer Range, PTB-Bericht, vol. PTB-F-39, edited by K. Hasche, W. Mirandé, and G. Wilkening, 2000.
15. D. Hüser and H. Rothe, Methods to recognize artefacts of AFM measurements as instrumental errors, in Proceedings of the 3rd Seminar on Quantitative Microscopy: Geometrical Measurements in the Micro-and Nanometer Range with Far and Near Field Methods, PTB-Bericht, no. PTBF-34, edited by K. Hasche, W. Mirandé, and G. Wilkening, 1998.
16. H. Rothe, D. Hüser, A. Kasper, and T. Rinder, Investigations of smooth surfaces by measuring the BRDF with a stray light sensor in comparison with PSD curves evaluated from topography of large AFM scans, in Surface Characterization for Computer Disks, Wafers, and Flat Panel Displays, Proc. SPIE, no. 3619, edited by J. C. Stover, 1990.
17. D. Hüser and H. Rothe, AFM data analysis: separating surface microtopography from instrumental artifacts, in Scattering and Surface Roughness III, Proc. SPIE, no. 4100-20, edited by Z.-H. Gu and A. Maradudin, 2000.