Optical metrology of surfaces

CIRP Annals - Manufacturing Technology

Volumn 54, Issue 2, 2005, Pages 169-183

  Hocken, R J ^a   Chakraborty, N ^a   Brown, C ^b  

^a UNIVERSITY OF NORTH CAROLINA AT CHARLOTTE   (United States)

^b WORCESTER POLYTECHNIC INSTITUTE   (United States)

Author keywords

Measuring Instrument; Optical; Surface

Indexed keywords

INDUSTRIAL ENGINEERING; OPTICAL ENGINEERING; OPTICAL INSTRUMENTS; OPTICAL VARIABLES MEASUREMENT; PROCESS CONTROL;

MEASURING INSTRUMENT; OPTICAL; OPTICAL TECHNIQUES; SURFACE;

SURFACE TOPOGRAPHY;

EID: 32044439580     PISSN: 00078506     EISSN: None     Source Type: Journal    
DOI: 10.1016/s0007-8506(07)60025-0     Document Type: Article

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