The vibroscanning method for the measurement of micro-hole profiles

Measurement Science and Technology

Volumn 10, Issue 8, 1999, Pages 697-705

  Kim, Beomjoon ^a,b   Masuzawa, Takahisa ^a   Bourouina, Tarik ^a,c  

^a INSTITUTE OF INDUSTRIAL SCIENCE   (Japan)

^b FEMTO ST INSTITUTE   (France)

^c CNRS   (France)

Author keywords

Dimensional measurement; Micro holes; Silicon based micro twin probe

Indexed keywords

ELECTRIC CONTACTS; MICROMACHINING; PROBES; SEMICONDUCTING SILICON;

MICRO-HOLES; SILICON-BASED MICRO-TWIN PROBES; VIBROSCANNING METHOD;

VIBRATION MEASUREMENT;

EID: 0033296223     PISSN: 09570233     EISSN: None     Source Type: Journal    
DOI: 10.1088/0957-0233/10/8/304     Document Type: Article

References (7)

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2. Mitsui K et al 1996 Measurement of geometric feature of micro-parts Proc. the Autumn Assembly of Japanese Society on Precision Engineering pp 171-2 (in Japanese)
3. Masuzawa T, Hamasaki Y and Fujino M 1993 Vibroscanning method for nondestructive measurement of small holes Annals CIRP 42 589-92
4. Kim B J, Sawamoto Y, Masuzawa T and Fujino M 1996 Advanced vibroscanning method for micro-hole measurement. High speed and stability improvement of measurement technique Int. J. Electr. Machining 1 41-4
5. Kuijper M P C, Yamamoto M, Yamaguchi K and Masuzawa T 1995 Profile measurement of micro-EDM holes with 3D vibroscanning method Denkikakogijutu 19/61 1-7 (in Japanese)
6. Masuzawa T, Fujino M, Kobayashi K and Suzuki T 1985 Wire electro-discharge grinding for micro-machining Annals CIRP 34 431-4
7. Kim B J, Masuzawa T, Fujita H and Tominaga A 1998 Dimensional measurement of micro-holes with silicon-based micro-twin-probes Proc. IEEE Int. Workshop on MEMS (25-29 January 1998, Heidelberg, Germany) pp 334-9