메뉴 건너뛰기




Volumn 22, Issue 4, 1998, Pages 220-232

Simple technique for observing periodic nonlinearities in Michelson interferometers

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTATIONAL METHODS; MEASUREMENT ERRORS;

EID: 0032182557     PISSN: 01416359     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0141-6359(98)00016-6     Document Type: Article
Times cited : (60)

References (15)
  • 1
    • 84975582306 scopus 로고
    • Residual errors in laser interferometry from air turbulence and nonlinearity
    • N. Bobroff Residual errors in laser interferometry from air turbulence and nonlinearity Appl Opt 26 1987 2676 2682
    • (1987) Appl Opt , vol.26 , pp. 2676-2682
    • Bobroff, N.1
  • 2
    • 0002674964 scopus 로고
    • Investigation and compensation of the nonlinearity of heterodyne interferometers
    • W. Hou G. Wilkening Investigation and compensation of the nonlinearity of heterodyne interferometers Prec Eng 14 1992 91 98
    • (1992) Prec Eng , vol.14 , pp. 91-98
    • Hou, W.1    Wilkening, G.2
  • 3
    • 0025022793 scopus 로고
    • Optical sources of nonlinearity in heterodyne interferometers
    • A.E. Rosenbluth N. Bobroff Optical sources of nonlinearity in heterodyne interferometers Prec Eng 12 1990 7 11
    • (1990) Prec Eng , vol.12 , pp. 7-11
    • Rosenbluth, A.E.1    Bobroff, N.2
  • 5
    • 0027624783 scopus 로고
    • Electronic limitations in phase meters for heterodyne interferometry
    • N.M. Oldham J.A. Kramar P.S. Hetrick E.C. Teague Electronic limitations in phase meters for heterodyne interferometry Prec Eng 15 1993 173 179
    • (1993) Prec Eng , vol.15 , pp. 173-179
    • Oldham, N.M.1    Kramar, J.A.2    Hetrick, P.S.3    Teague, E.C.4
  • 6
    • 0030172227 scopus 로고    scopus 로고
    • A laser measurement system for the high precision calibration of displacement transducers
    • U. Brand K. Hermann A laser measurement system for the high precision calibration of displacement transducers Meas Sci Technol 7 1996 911 917
    • (1996) Meas Sci Technol , vol.7 , pp. 911-917
    • Brand, U.1    Hermann, K.2
  • 7
    • 0030650183 scopus 로고    scopus 로고
    • Development of a traceable laser-based displacement calibration system with nanometer accuracy
    • S.F.C.L. Wetzels P.H.J. Schellekens Development of a traceable laser-based displacement calibration system with nanometer accuracy Ann CIRP 46 1997 481 484
    • (1997) Ann CIRP , vol.46 , pp. 481-484
    • Wetzels, S.F.C.L.1    Schellekens, P.H.J.2
  • 8
    • 0023430468 scopus 로고
    • Nonlinearity in length measurement using heterodyne laser Michelson interferometry
    • C.M. Sutton Nonlinearity in length measurement using heterodyne laser Michelson interferometry J Phys E: Sci Instrum 20 1987 1290 1292
    • (1987) J Phys E: Sci Instrum , vol.20 , pp. 1290-1292
    • Sutton, C.M.1
  • 10
    • 0027676980 scopus 로고
    • Importance of rotational beam alignment in the generation of second harmonic errors in laser heterodyne interferometry
    • J.M. De Freitas M.A. Player Importance of rotational beam alignment in the generation of second harmonic errors in laser heterodyne interferometry Meas Sci Technol 4 1993 1173 1176
    • (1993) Meas Sci Technol , vol.4 , pp. 1173-1176
    • De Freitas, J.M.1    Player, M.A.2
  • 11
    • 0002086653 scopus 로고    scopus 로고
    • Nonlinearity in measurements of length by optical interferometry
    • C. Wu C. Su Nonlinearity in measurements of length by optical interferometry Meas Sci Technol 7 1996 62 68
    • (1996) Meas Sci Technol , vol.7 , pp. 62-68
    • Wu, C.1    Su, C.2
  • 12
    • 85120122556 scopus 로고    scopus 로고
    • Howard, L. and Stone, J. A. “Computer Modeling of Heterodyne Interferometer Errors,” Proceedings of the ASPE 1995 annual meeting, Austin Texas , 143–146
  • 13
    • 0028196403 scopus 로고
    • Drift of nonlinearity in the heterodyne interferometer
    • W. Hou X. Zhao Drift of nonlinearity in the heterodyne interferometer Prec Eng 16 1994 25 35
    • (1994) Prec Eng , vol.16 , pp. 25-35
    • Hou, W.1    Zhao, X.2
  • 14
    • 0001644146 scopus 로고
    • A new calculus for the treatment of optical systems
    • R.C. Jones A new calculus for the treatment of optical systems J Opt Soc Am 31 1941 488 493
    • (1941) J Opt Soc Am , vol.31 , pp. 488-493
    • Jones, R.C.1
  • 15
    • 85120128802 scopus 로고
    • R. Azzam N. Bashara Ellipsometry and Polarized Light 1977 North-Holland New York 66
    • (1977) , pp. 66
    • Azzam, R.1    Bashara, N.2


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.