Micromachined piezoelectric Elastic Force Motor (EFM)

Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2000, Pages 52-55

  Dellmann, L ^a   Racine, G A ^a   de Rooij, N F ^a  

^a UNIVERSITY OF NEUCHÂTEL   (Switzerland)

Author keywords

[No Author keywords available]

Indexed keywords

ANISOTROPY; COPPER ALLOYS; ELECTRIC MOTORS; ENERGY UTILIZATION; ETCHING; LASER BEAM CUTTING; MICROMACHINING; PIEZOELECTRIC DEVICES; SEMICONDUCTING SILICON; STATORS;

MICROFABRICATED MOTORS; PIEZOELECTRIC ELASTIC FORCE MOTORS;

MICROELECTROMECHANICAL DEVICES;

EID: 0033709147     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Article

References (8)