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Volumn 5879, Issue , 2005, Pages 1-8

Ultra precision micro-CMM using a low force 3D touch probe

Author keywords

3D probe; CMM; Coordinate measuring machine; Dimensional Metrology; Error separation

Indexed keywords

CALIBRATION; ERRORS; INTERFEROMETRY; KINEMATICS; OPTICAL SENSORS; PROBES;

EID: 29244486807     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.618692     Document Type: Conference Paper
Times cited : (11)

References (11)


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.