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Volumn 5879, Issue , 2005, Pages 1-8
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Ultra precision micro-CMM using a low force 3D touch probe
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Author keywords
3D probe; CMM; Coordinate measuring machine; Dimensional Metrology; Error separation
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Indexed keywords
CALIBRATION;
ERRORS;
INTERFEROMETRY;
KINEMATICS;
OPTICAL SENSORS;
PROBES;
3D PROBE;
DIMENSIONAL METROLOGY;
ERROR SEPARATION;
COORDINATE MEASURING MACHINES;
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EID: 29244486807
PISSN: 0277786X
EISSN: None
Source Type: Conference Proceeding
DOI: 10.1117/12.618692 Document Type: Conference Paper |
Times cited : (11)
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References (11)
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