Modeling and verifying non-linearities in heterodyne displacement interferometry

Precision Engineering

Volumn 26, Issue 4, 2002, Pages 448-455

  Cosijns, S J A G ^a   Haitjema, H ^a   Schellekens, P H J ^a  

^a EINDHOVEN UNIVERSITY OF TECHNOLOGY   (Netherlands)

Author keywords

Interferometry; Non linearities

Indexed keywords

HETERODYNING; INTERFEROMETRY; LASER APPLICATIONS; LIGHT POLARIZATION; MATHEMATICAL MODELS; OPTICAL BEAM SPLITTERS; REFRACTIVE INDEX;

LASER SOURCE;

NONLINEAR OPTICS;

EID: 0036776413     PISSN: 01416359     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0141-6359(02)00150-2     Document Type: Article

References (14)

1. Electronic limitations in phase meters for heterodyne interferometry
2. Investigation and compensation of the non-linearity of heterodyne interferometers
3. Importance of rotational beam alignment in the generation of second harmonic errors in laser heterodyne interferomertry
4. A simple technique for observing periodic nonlinearities in Michelson interferometers
5. A frequency domain method for the measurement of nonlinearity in heterodyne interferometry
6. Reduction of systematic errors in heterodyne interferometric displacement measurement
7. Optical sources of non-linearity in heterodyne interferometers
8. Nonlinearity in interferometer measurements
9. Computer modeling of heterodyne interferometer errors
10. Zeeman laser interferometer errors for high-precision measurements
11. Non-linearity in length measurement using heterodyne laser Michelson interferometry
12. Accurate measurement of the refractive index of air