Height and Pitch at Nanoscale-How Traceable is Nanometrology?

Nanoscale Calibration Standards and Methods: Dimensional and Related Measurements in the Micro-and Nanometer Range

Volumn , Issue , 2006, Pages 205-219

  Koenders, L ^a   Meli, F ^b  

^a PHYSIKALISCH TECHNISCHE BUNDESANSTALT   (Germany)

^b Swiss Federal Office of Metrology   (Switzerland)

Author keywords

Calibration; Height at nanoscale; Instrumentation; Methods; Nanometrology; Nanoscale calibration standards; One dimensional pitch standards (NANO4); Pitch at nanoscale; Step height (NANO4)

Indexed keywords

EID: 73149090477     PISSN: None     EISSN: None     Source Type: Book    
DOI: 10.1002/3527606661.ch15     Document Type: Chapter

References (8)

1. Review of Standards, see www.ptb.de/5/51/514/index.htm
2. F. Meli, International comparison in the field of nanometrology: pitch of 1D gratings (Nano4), in Proc. of 2nd Euspen Int. Conf., Turin, May 27th-31st (2001), Vol. 1, p. 358.
3. H. Bosse, W. Häßler-Grohne, J. Flügge, and R. Küning, Final report on CCL-S3 supplementary line scale comparison Nano3, Metrologia 40(Technical Supplement), 04002 (2003).
4. L. Koenders, R. Bergmans, J. Garnaes, J. Haycocks, N. Korolev, T. Kurosawa, F. Meli, B. C. Park, G. S. Peng, G. B. Picotto, E. Prieto, S. Gao, B. Smereczynska, T. Vorburger, and G. Wilkening, Comparison on nanometrology: Nano 2-Stepheight, Metrologia 40(Technical Supplement), 04001 (2003).
5. Moxtek, www. moxtek.com
6. Guide to the Expression of Uncertainty in Measurement (GUM), ISO, 1995.
7. F. Meli and R. Thalmann, Long-range AFM profiler used for accurate pitch measurements, Meas. Sci. Technol. 9, 1087-1092 (1998).
8. Th. Dziomba, W. Hüßler-Grohne, H. Bosse, H.-U. Danzebrink, and G. Wilkening, Influence of nanostandard properties on calibration procedures of SPMs, in Proc. 4th International Euspen Conference (2003), Vol. 2, pp. 491-494.