An elastically guided machine axis with nanometer repeatability

CIRP Annals - Manufacturing Technology

Volumn 54, Issue 1, 2005, Pages 487-490

  Seggelen, J K V ^a   Rosielle, P C J N ^a   Schellekens, P H J ^a   Spaan, H A M ^b   Bergmans, R H ^c   Kotte, G J W L ^c  

^a EINDHOVEN UNIVERSITY OF TECHNOLOGY   (Netherlands)

^b IBS Precision Engineering   (Netherlands)

^c NMi Van Swinden Laboratorium   (Netherlands)

Author keywords

Calibration; Coordinate measuring machine (CMM); Design

Indexed keywords

ACTUATORS; CALIBRATION; DESIGN; DRIVES; INTERFEROMETERS; LASER APPLICATIONS; NANOTECHNOLOGY; SPRINGS (COMPONENTS); STIFFNESS; STRESSES; STRUCTURAL DESIGN; TENSILE TESTING;

AXIS ROTATION; ELASTICALLY GUIDED VERTICAL AXIS; LORENTZ ACTUATORS; VOLUMETRIC UNCERTAINTY;

COORDINATE MEASURING MACHINES;

EID: 21944452961     PISSN: 00078506     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0007-8506(07)60151-6     Document Type: Article

References (7)

1. Van Seggelen J.K., 2002, Design of a 3-D CMM with elastically guided z-axis and x,y axis with less than 2 mm ABBE offset, in 3rd International Conference and 4th General Meeting of EUSPEN; Netherlands, 29-32
2. Project: TSGE 2111, SenterNovem, NL
3. Frictionless air supply system to an air-bearing guide, 2004, Dutch patent nr: 1025662
4. Vermeulen M.M.P.A., 1999, High Precision 3D-Coordinate Measuring Machine, Design and Prototype-Development, Ph.D. thesis, TU/e, The Netherlands
5. Ruijl T, 2001, Ultra Precision Coordinate Measuring Machine, Ph.D. thesis, Delft University of Technology, The Netherlands
6. Schellekens P.H.J., et al., 1998, Design for Precision: Current Status and Trends, Annals of the CIRP, 47/2/1998, 557-586
7. Peggs G.N., et al., 1999, Design for a compact high accuracy CMM, Annals of the CIRP, 48/1/1999, 417-420